Superior imaging resolution in scanning helium-ion microscopy: A look at beam-sample interactions

Journal of Applied Physics

Volumn 104, Issue 6, 2008, Pages

  Cohen Tanugi, David ^a   Yao, Nan ^a  

^a Princeton University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 54749102000     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2976299     Document Type: Article

References (20)

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