Adiabatic and nonadiabatic nanofabrication by localized optical near fields

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5339, Issue , 2004, Pages 619-630

  Kawazoe, Tadashi ^a   Ohtsu, Motoichi ^a,b  

^a JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

^b TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Nonadiabatic process; Optical CVD; Optical near field; Photochemical reaction; Photolithography

Indexed keywords

MATHEMATICAL MODELS; MOLECULAR VIBRATIONS; NANOSTRUCTURED MATERIALS; NANOTECHNOLOGY; PHONONS; PHOTOCHEMICAL REACTIONS; PHOTODISSOCIATION; PHOTOLITHOGRAPHY; PHOTONS; RESONANCE;

NONADIABATIC PROCESS; OPTICAL CHEMICAL VAPOR DEPOSITION; OPTICAL NEAR FIELD; PHOTOCHEMICAL PROCESS;

CHEMICAL VAPOR DEPOSITION;

EID: 5444266044     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.533245     Document Type: Conference Paper

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