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Journal of Ceramic Processing Research

Volumn 5, Issue 3, 2004, Pages 232-237

Microstructural characteristics and film properties of diamond-like carbon coatings grown by PECVD

(3) Yang, Won Jae a Niihara, Koichi b Auh, Keun Ho a

a Hanyang University (South Korea)

b OSAKA UNIVERSITY (Japan)

Author keywords

Chemical structure; Diamond like carbon; Friction coefficient; Mechanical property; Raman

Indexed keywords

CARBON; DIAMOND;

ARTICLE; DECOMPOSITION; ELECTRIC POTENTIAL; FILM; FLOW MEASUREMENT; FRICTION; GAS; INFRARED SPECTROSCOPY; MATERIAL COATING; MEASUREMENT; RAMAN SPECTROMETRY; STRUCTURE ANALYSIS;

EID: 5444257486 PISSN: 12299162 EISSN: None Source Type: Journal
DOI: None Document Type: Article

Times cited : (3)

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