Micro electro mechanical devices for fiber optic telecommunication

JSME International Journal, Series B: Fluids and Thermal Engineering

Volumn 47, Issue 3, 2004, Pages 439-446

  Toshiyoshi, Hiroshi ^a,b  

^a INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

^b UNIVERSITY OF TOKYO   (Japan)

Author keywords

Attenuator; Electrostatic microactuator; Fiber optics; Optical MEMS; Optical switch

Indexed keywords

FIBER OPTICS; FITS AND TOLERANCES; MICROOPTICS; MIRRORS; SCANNING; WAVEGUIDE ATTENUATORS;

MECHANICAL TOLERANCE; OPTICAL CROSSCONNECTS;

MICROELECTROMECHANICAL DEVICES;

FIBER OPTICS;

EID: 5444233501     PISSN: 13408054     EISSN: None     Source Type: Journal    
DOI: 10.1299/jsmeb.47.439     Document Type: Article

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