Precision readout circuits for capacitive microaccelerometers

Proceedings of IEEE Sensors

Volumn 1, Issue , 2004, Pages 28-31

  Yazdi, Navid ^a   Kulah, Haluk ^a   Najafi, Khalil ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

Capacitive sensor readout circuit; MEMS accelerometer interface; Micro g accelerometer

Indexed keywords

CAPACITANCE; MICROMACHINING; SENSORS;

PARASITIC CAPACITANCE; READOUT CIRCUITS;

ACCELEROMETERS;

EID: 27944451089     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)

1. S.J. Sherman, et.al., "Low cost monolithic accelerometer", Dig. VLSI Circuits Symp., June 1992, pp. 34-35.
2. K. Chau, S.R. Lewis, Y, Zhao, R. T. Howe, S.F. Bart, and R.G. Marcheselli, "An integrated force-balanced capacitive accelerometer for low-g applications," 1995 IEEE Conf. on Solid-State Sensors & Actuators, June 1995, pp. 593-596.
3. J. Wu, G.K. Fedder, L.R. Carley, "A low-noise low-offset capacitive sensing amplifier for a 50-μg/√Hz monolithic CMOS MEMS accelerometer", IEEE J. of Solid-State Circuits, vol. 39. May 2004, pp. 722-730.
4. W. Yun, R.T. Howe, and P.R. Gray, "Surface micromachined digitally force-balanced accelerometer with integrated CMOS detection circuitry," Solid-State Sensor and Actuator Workshop, Hilton-Head Island, SC, USA, June 1992, pp. 126-131.
5. J. A. Geen, S. J. Sherman, J. F. Chang, S. R. Lewis, "Single-chip surface micromachined integrated gyroscope with 50°/h Allan deviation," IEEE J. of Solid-State Circuits, vol. 37, Dec. 2002, pp. 1860-1866.
6. N. Yazdi, A. Mason, K. Najafi, K.D. Wise," A generic interface chip for capacitive sensors in low-power multiparameter microsystems," Sensors & Actuators Part A, vol. 84, Sep. 2000, pp. 351-361.
7. N. Yazdi, K. Najafi, "An interface IC for a capacitive silicon μg accelerometer," 1999 IEEE Int. Solid-State Circuits Conf., Feb. 1999, pp. 132-133.
8. N. Wongkomet, B. E. Boser, "Correlated double sampling in capacitive position sensing circuits for micromachined applications," 1998 IEEE Asia-Pacific Conf. on Circuits and Systems, Nov. 1998, pp.723-726.
9. M. Lemkin, B. Boser, "A three-axis micromachined accelerometer with a CMOS position-sense interface and digital offset-trim electronics," IEEE J. of Solid-State Circuit, vol. 34, April 1999, pp. 456-468.
10. H. Kulan, J. Chae, N. Yazdi, K. Najafi, "A multi-step electromechanical sigma-delta converter for micro-g capacitive accelerometers, " 2003 IEEE Int. Solid-State Circuits Conference, Feb. 2003, pp. 202-203.
11. N. Yazdi, K. Najafi, "An all-silicon single-wafer micro-g accelerometer with combined surface & bulk micromachining process," IEEE/ASME J. of Microelectromechanical Systems, vol. 9, Dec. 2000, pp. 544-550.