Low-loss optical interposer with recessed vertical-cavity surface-emitting laser diode and photodiode chips into Si substrate

Japanese Journal of Applied Physics

Volumn 47, Issue 4 PART 2, 2008, Pages 2936-2940

  Fujiwara, Makoto ^a,b   Terada, Shinsuke ^a   Shirato, Yoji ^a   Owari, Hiroshi ^a   Watanabe, Kei ^a   Matsuyama, Mutsuhiro ^a   Takahama, Keizo ^a   Mori, Tetsuya ^a   Miyao, Kenji ^a   Choki, Koji ^a   Fukushima, Takafumi ^b   Tanaka, Tetsu ^b   Koyanagi, Mitsumasa ^b  

^a Sumitomo Bakelite Co Ltd ^*  (Japan)

^b TOHOKU UNIVERSITY   (Japan)

Author keywords

Optical interconnection; Optical interposer; Optical waveguide; Passive alignment; Polynorbornene (PNB)

Indexed keywords

ABS RESINS; ALIGNMENT; ELECTRON BEAM LITHOGRAPHY; INTEGRATED OPTOELECTRONICS; LASERS; LEAD; OPTICAL INTERCONNECTS; PHOTODIODES; REACTIVE ION ETCHING; SEMICONDUCTING SILICON COMPOUNDS; SILICON; SUBSTRATES; SURFACE CHEMISTRY; SURFACE EMITTING LASERS; SURFACE TENSION; WAVEGUIDES;

CAVITY SURFACES; COUPLING LOSSES; DEEP REACTIVE ION ETCHINGS; HIGH-PERFORMANCE; HOLE PATTERNS; LASER DIODES; LEAD-FREE SOLDERS; MICROMIRRORS; OPTICAL; OPTICAL INTERCONNECTION; OPTICAL INTERCONNECTIONS; OPTICAL INTERPOSER; PARALLEL PROCESSORS; PASSIVE ALIGNMENT; PASSIVE ALIGNMENTS; POLYMERIC WAVEGUIDES; POLYNORBORNENE; POLYNORBORNENE (PNB); SELF-ASSEMBLY; SI SUBSTRATES;

OPTICAL WAVEGUIDES;

EID: 54249097875     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.47.2936     Document Type: Article

References (10)

1. M. Koyanagi, T. Nakano, T. Etoh, and R. Aibara: Proc. SPIE 1849 (1993) 233.
2. A. F. J. Levi: Proc. IEEE 88 (2000) 750.
3. T. Mikawa, M. Kinoshita, K. Hiruma, T. Ishitsuka, M. Okabe, S. Hiramatsu, H. Furuyama, T. Matsui, K. Kumai, O. Ibaragi, and M. Bonkohara: IEEE J. Sel. Top, Quantum Electron. 9 (2003) 452.
4. H. Kuribara, H. Hashimoto, T. Fukushima, and M. Koyanagi: Jpn. J. Appl. Phys. 45 (2006) 3504.
5. L. Schares, J. A. Kash, F. E. Doany, C. L. Schow, C. Schuster, D. M. Kuchta, P. K. Pepeljugoski, J. M. Trewhella, C. W. Baks, R. A. John, L. Shan. Y. H. Kwark, R. A. Budd, P. Chiniwalla, F. R. Libsch, J. Rosner, C. K. Tsang, C. S. Patel, J. D. Schaub, R. Dangel, F. Horst, B. J. Offrein, D. Kucharski, D. Guckenberger, S. Hegde, H. Nyikal, C.-K. Lin, A. Tandon, G. R. Trott, M. Nystrom, D. P. Bour, M. R. T. Tan, and D. W. Dolfl: IEEE J. Sel. Top. Quantum Electron. 12 (2006) 1032.
6. Y. Ishii, S. Koike, Y. Arai, and Y. Ando: IEEE Trans. Adv. Packag. 26 (2003) 122.
7. B. S. Rho, S. Kang, H. S. Cho, H.-H. Park, S.-W. Ha, and B.-H. Rhee: J. Lightwave Technol. 22 (2004) 2128.
8. O. O. Ogunsola, H. D. Thacker, B. L. Bachim, M. S. Bakir, J. Pikarsky. T. K. Gayload, and J. D. Meindl: IEEE Photonics Technol. Lett. 18 (2006) 1672.
9. H. Hanajima, Y. Obata, H. Ozawa, M. Kanda, and O. Mikami: IEEE Photonics Technol. Lett. 18 (2006) 2020.
10. M. Fujiwara, Y. Shirato, H. Owari, K. Watanabe, M. Matsuyama, K. Takahama, T. Mori, K. Miyao, K. Choki, T. Fukushima, T. Tanaka, and M. Koyanagi: Jpn. J. Appl. Phys. 46 (2007) 2395.