Electron dynamics of low-pressure deposition plasma

Pure and Applied Chemistry

Volumn 80, Issue 9, 2008, Pages 1883-1892

  Yasuda, Hirotsugu ^a   Ledernez, Loic ^a   Olcaytug, Fethi ^a   Urban, Gerald ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

Author keywords

Breakdown process; Electron dynamics; Magnetron plasma polymerization; Plasma polymerization; Primary electron emission

Indexed keywords

EID: 53949124340     PISSN: 00334545     EISSN: None     Source Type: Journal    
DOI: 10.1351/pac200880091883     Document Type: Conference Paper

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