Electrical breakdown of argon and trimethylsilane in low-pressure DC discharges: The surface-states equilibration principle

Plasma Processes and Polymers

Volumn 4, Issue 4, 2007, Pages 347-359

  Yasuda, Hirotsugu ^a  

^a UNIVERSITY OF MISSOURI   (United States)

Author keywords

DC glow discharge; Electron energy distribution; Electron impact dissociation; Electron impact ionization; Plasma polymerization

Indexed keywords

ARGON; DISSOCIATION; ELECTRIC BREAKDOWN OF GASES; ELECTRON TEMPERATURE; ELECTRONIC DENSITY OF STATES; IONIZATION; PLASMA POLYMERIZATION;

DC GLOW DISCHARGE; ELECTRON IMPACT DISSOCIATION; ELECTRON IMPACT IONIZATION; TRIMETHYLSILANE;

GLOW DISCHARGES;

EID: 34250171215     PISSN: 16128850     EISSN: 16128869     Source Type: Journal    
DOI: 10.1002/ppap.200600160     Document Type: Article

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