Cathode glow polymerization of trimethylsilane

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 22, Issue 3, 2004, Pages 472-476

  Yasuda, Hirotsugu ^a   Yu, Qingsong ^a  

^a University of Missouri   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CATHODE SURFACES; DEPOSITION RATES; ELECTRON TEMPERATURE; GAS PHASES;

ALUMINUM ALLOYS; CATHODES; DISSOCIATION; ENERGY TRANSFER; GLOW DISCHARGES; HYDROGEN; INERT GASES; IONIZATION; MATHEMATICAL MODELS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASMA POLYMERIZATION; PLASMA THEORY; X RAY PHOTOELECTRON SPECTROSCOPY;

SILANES;

EID: 3142514465     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1690776     Document Type: Article

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