Vertically moving micromirror for detectors in the mid infrared

Sensors and Actuators, A: Physical

Volumn 143, Issue 1, 2008, Pages 29-33

  Quack, Niels ^a   Blunier, Stefan ^a   Dual, Jurg ^a   Arnold, Martin ^a   Felder, Ferdinand ^a   Ebneter, Christian ^a   Rahim, Mohamed ^a   Zogg, Hans ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

Infrared; MEMS; Micromirror; RCED; Tunable detector

Indexed keywords

CAVITY RESONATORS; ELECTROSTATIC ACTUATORS; INFRARED SPECTROSCOPY; MEASUREMENT THEORY; SINGLE CRYSTALS; THERMOGRAPHY (IMAGING);

MICROMIRROR; OPTICAL CAVITY; RESONANT CAVITY ENHANCED DETECTOR (RCED); STANDING WAVE; TUNABLE DETECTOR;

PHOTODETECTORS;

EID: 40949155211     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2007.06.013     Document Type: Article

References (5)

1. Quack I., Züst N., Blunier S., Dual J., Arnold M., Felder F., Rahim M., and Zogg H. Electrostatically actuated micromirror for resonant cavity enhanced detectors. 20th IEEE Conference on Micro Electro Mechanical Systems. Kobe, Japan (2007)
2. Arnold M., Zimin D., and Zogg H. Resonant-cavity-enhanced photodetectors for the mid-infrared. Appl. Phys. Lett. 87 (2005) 141103
3. Unlu M.S., and Strite S. Resonant cavity enhanced photonic devices. J. Appl. Phys. 78 (1995) 608
4. Felder F., Arnold M., Rahim M., Ebneter C., Zogg H., Quack N., Blunier S., and Dual J. Narrowband resonant cavity enhanced mid-IR photodetectors tuneable within a broad wavelength region, EUROMBE 14. 14th European Molecular Beam Epitaxy Workshop. Granada, Spain, March 5-7 (2007)
5. Musca C.A., Antoszewski J., Winchester K.J., Keating A.J., Nguyen T., Silva K.K.M.B.D., Dell J.M., Faraone L., Mitra P., Beck J.D., Skokan M.R., and Robinson J.E. Monolithic integration of an infrared photon detector with a MEMS-based tunable filter. IEEE Electron Dev. Lett. 26 December (12) (2005)