X-ray multilevel zone plate fabrication by means of electron-beam lithography: Toward high-efficiency performances

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 17, Issue 6, 1999, Pages 3439-3443

  Di Fabrizio, Enzo ^a   Gentili, Massimo ^b  

^a SINCROTRONE TRIESTE   (Italy)

^b Ist Di Elettron Stato Solido C   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033261775     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.591026     Document Type: Article

References (11)

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