Fabrication of high frequency ZnO thin film SAW devices on silicon substrate with a diamond-like carbon buffer layer using RF magnetron sputtering

Vacuum

Volumn 83, Issue 3, 2008, Pages 675-678

  Shih, Wen Ching ^a   Huang, Rei Ching ^a  

^a TATUNG UNIVERSITY   (Taiwan)

Author keywords

Diamond like carbon (DLC); Sputtering; Surface acoustic wave (SAW); Zinc oxide (ZnO)

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC SURFACE WAVE FILTERS; ACOUSTIC WAVE VELOCITY; ACOUSTIC WAVES; ACOUSTICS; CARBON DIOXIDE ARC WELDING; DIAMOND FILMS; DIAMONDS; ELECTRIC CURRENTS; ELECTRIC LOAD MANAGEMENT; LITHOGRAPHY; MAGNETRONS; NONMETALS; OPTICAL DESIGN; OXIDES; SAWING; SEMICONDUCTING ZINC COMPOUNDS; SILICON; THICK FILMS; THIN FILM DEVICES; THIN FILMS; WAVE ENERGY CONVERSION; ZINC; ZINC ALLOYS; ZINC OXIDE;

ACOUSTIC VELOCITIES; BUFFER LAYERS; DIAMOND-LIKE CARBON; DIAMOND-LIKE CARBON (DLC); HIGH FREQUENCIES; OPTIMIZED PARAMETERS; RF POWERING; RF-MAGNETRON SPUTTERING; SAW DEVICES; SILICON SUBSTRATES; SPUTTERING; SURFACE ACOUSTIC WAVE (SAW); SURFACE ACOUSTIC WAVE DEVICES; ZINC OXIDE (ZNO); ZNO THIN FILMS;

MAGNETRON SPUTTERING;

EID: 52949113430     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2008.04.028     Document Type: Article

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