DLC films on LiTaO3 for SAW devices

Surface and Coatings Technology

Volumn 180-181, Issue , 2004, Pages 234-237

  Meunier, C ^a   Munnik, F ^b   Germann, E ^b   Schluechter, R ^b   Pujol, M D ^c   Kondratiev, S N ^c   Mikhailov, S ^b  

^a CREST   (France)

^b Ecole d'Ingenieurs de l'Arc Jurassien   (Switzerland)

^c Temex SAW   (Switzerland)

Author keywords

Carbon thin films; LiTaO3; PECVD; RBS ERDA; XRR

Indexed keywords

CHEMICAL MODIFICATION; DEPOSITION; LITHIUM COMPOUNDS; METALLIZING; METHANE; PIEZOELECTRIC MATERIALS; PLASMA APPLICATIONS; X RAY PHOTOELECTRON SPECTROSCOPY;

X-RAY REFLECTOMETRY;

DIAMOND LIKE CARBON FILMS;

COATING;

EID: 16744361807     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2003.10.047     Document Type: Article

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