Influence of Ga2O3 addition on transparent conductive oxide films of In2O3-ZnO

Vacuum

Volumn 83, Issue 3, 2008, Pages 561-563

  Tominaga, Kikuo ^a   Takada, Daisuke ^a   Shimomura, Kouji ^a   Suketa, Hiroshi ^a   Takita, Keisuke ^a   Murai, Keiichirou ^a   Moriga, Toshihito ^a  

^a UNIVERSITY OF TOKUSHIMA   (Japan)

Author keywords

Amorphous; In2O3; IZO; TCO; Transparent; ZnO

Indexed keywords

AMORPHOUS FILMS; CONDUCTIVE FILMS; GALLIUM; ZINC;

AMORPHOUS; IN2O3; IZO; TCO; TRANSPARENT; TRANSPARENT CONDUCTIVE OXIDE FILMS; ZNO;

OXIDE FILMS;

EID: 52949109799     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2008.04.064     Document Type: Article

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