Highly sensitive waveguide-based porous anodic alumina nanosensors for monitoring atomic layer deposition

2008 2nd IEEE International Nanoelectronics Conference, INEC 2008

Volumn , Issue , 2008, Pages 589-592

  Gao, Han ^a   Zong, Yun ^a   Tan, Lee Kheng ^a   Chong, Maria A S ^a  

^a INSTITUTE OF MATERIALS RESEARCH AND ENGINEERING   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; ALUMINUM SHEET; ATOMIC PHYSICS; ATOMS; DIELECTRIC MATERIALS; ELECTRONICS ENGINEERING; INTEGRATED OPTOELECTRONICS; NANOELECTRONICS; OPTICAL ENGINEERING; OPTICAL WAVEGUIDES; ORE TREATMENT; PHYSICAL VAPOR DEPOSITION; PULSED LASER DEPOSITION; WAVEGUIDES;

ATOMIC LAYER DEPOSITIONS; EFFECTIVE DIELECTRIC CONSTANTS; HIGHLY SENSITIVE; OPTICAL METHODS; PLANAR OPTICAL WAVEGUIDES; POROUS ANODIC ALUMINA; POROUS ANODIC ALUMINA FILMS;

ATOMIC LAYER DEPOSITION;

EID: 52649161375     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/INEC.2008.4585556     Document Type: Conference Paper

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