Beating the heat: Controlling thermal effects in plasma dispersion tuned SOI waveguide devices

IEEE International Conference on Group IV Photonics GFP

Volumn , Issue , 2006, Pages 258-260

  Waldron, Philip D ^a   Panesar, Harpreet ^b   Tarr, N Garry ^b   Smy, Tom J ^b   Jessop, Paul E ^a  

^a MCMASTER UNIVERSITY   (Canada)

^b CARLETON UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

PHOTONICS; WAVEGUIDE COMPONENTS;

DESIGN APPROACHES; HEAT FLOW EQUATIONS; NUMERICAL SOLUTION; PLASMA DISPERSION; SOI WAVEGUIDE DEVICES; THERMOOPTIC TUNING;

BIPOLAR SEMICONDUCTOR DEVICES;

EID: 52649106254     PISSN: 19492081     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/group4.2006.1708232     Document Type: Conference Paper

References (11)

1. For a review, see G.T. Reed and A.P. Knights, Silicon Photonics, Wiley, 2004.
2. P. Dainesi et al "CMOS compatible fully integrated Mach-Zehnder interferometer in SOI technology", IEEE Photon. Tech. Lett. 12,:p. 660, 2000.
3. P. D. Waldron et al, "Optical modulator in silicon-on-insulator with a low thermal signature", J. Vac. Sci. Tech. A 22, p. 800, 2004.
4. C.E. Png et al, "Optical phase moduators for MHz and GHz modulation in SOI", IEEE J. Lightwave Tech. 22, p. 1573, 2004.
5. A. Liu et al, "A high speed silicon optical modulator based on a metal-oxide-semiconductor capacitor", Nature 427, p. 615, 2004.
6. R.A. Soref and B.R. Bennett, "Electrooptical Effects in Silicon", IEEE J. Quant. Elec. 23, p. 123, 1987.
7. G.L. Patton et al, "Physics, technology and modeling of polyslicon emitter contacts for VLSI bipolar transistors", IEEE Trans. Electron Dev. ED-33, p. 1754, 1986.
8. M.R. Pinto et al, PISCES-II, Technical report, Stanford University, 1984.
9. B.J. Streetman, Solid State Electronic Devices, 2nd ed., Prentice-Hall, 1980, p. 170.
10. T.J. Smy et al, "A 3D thermal simulation tool for integrated devices-ATAR", IEEE Trans. Comp. Aided Des. 20, p 105, 2001.
11. J.G. Cocorullo et al, "Temperature dependence of the thermo-optic coefficient in crystalline silicon between room temperature and 550 K at the wavelength of 1523 nm", Appl. Phys. Lett. 74, p. 3338, 1999.