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Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 22, Issue 3, 2004, Pages 800-802

Optical modulator in silicon-on-insulator with a low thermal signature

(10) Waldron, P D a Jessop, P E a Yuen, A P a Winchiu, L b Chyurlia, P b Tarr, N G b Smy, T J b Golub, I c Xu, D X c Janz, S c

a MCMASTER UNIVERSITY (Canada)

b CARLETON UNIVERSITY (Canada)

c NATIONAL RESEARCH COUNCIL CANADA (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ANTIREFLECTION COATINGS; CARRIER CONCENTRATION; DIODES; DOPING (ADDITIVES); ELECTROOPTICAL EFFECTS; INSERTION LOSSES; INTEGRATED OPTICS; INTERFEROMETERS; OPTICAL SWITCHES; OPTICAL WAVEGUIDES; REACTIVE ION ETCHING; REFRACTIVE INDEX; SILICON ON INSULATOR TECHNOLOGY; THERMAL CONDUCTIVITY; THERMAL EFFECTS;

MACH-ZEHNDER INTERFEROMETERS; PLASMA DISPERSION EFFECTS; TELECOMMUNICATION BANDS; THERMAL MODULATION;

LIGHT MODULATORS;

EID: 3142611796 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.1647586 Document Type: Conference Paper

Times cited : (2)

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