Observation of microcontaminants on pure chromium surface by AFM and their removal by UV light illumination

Surface and Interface Analysis

Volumn 40, Issue 9, 2008, Pages 1284-1288

  Wang, Rongguang ^a  

^a HIROSHIMA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Atomic force microscope; Illumination; Mcirocontaminant; Surface cleaning; UV light

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHROMIUM; EXTREME ULTRAVIOLET LITHOGRAPHY; IMAGING TECHNIQUES; METAL RECOVERY; MOLECULAR ORBITALS; MOLECULAR SPECTROSCOPY; MOTOR BOATS; PHOTOELECTRON SPECTROSCOPY; ULTRAVIOLET PHOTOELECTRON SPECTROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

AIR-EXPOSURE; ATOMIC FORCE MICROSCOPE; ILLUMINATION; MCIROCONTAMINANT; MICRO-CONTAMINANTS; ORGANIC SUBSTANCES; SPECIMEN SURFACES; SURFACE CLEANING; ULTRAVIOLET LIGHT; UV LIGHT; UV-LIGHT ILLUMINATION; X-RAY PHOTOELECTRON SPECTROSCOPY XPS;

IMPURITIES;

EID: 52649099862     PISSN: 01422421     EISSN: 10969918     Source Type: Journal    
DOI: 10.1002/sia.2879     Document Type: Article

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