A new method for cleaning the surface of ultra high-purity iron by high-purity ozone exposure and UV irradiation

Materials Transactions, JIM

Volumn 38, Issue 5, 1997, Pages 451-456

  Suzuki, Shigeru ^a   Ichimura, Shingo ^b   Kurokawa, Akira ^b   Ishikawa, Yukio ^a   Isshiki, Minoru ^a   Waseda, Yoshio ^a  

^a TOHOKU UNIVERSITY   (Japan)

^b ELECTROTECHNICAL LABORATORY   (Japan)

Author keywords

Oxidation; Ozone; Surface cleaning; Ultra high purity iron; X ray photoelectron spectroscopy

Indexed keywords

CARBON; CONTAMINATION; OXIDATION; OZONE; SURFACE CLEANING; ULTRAVIOLET RADIATION; X RAY PHOTOELECTRON SPECTROSCOPY;

CARBOXYL CARBON; ULTRA HIGH PURITY IRON;

IRON;

EID: 0031147346     PISSN: 09161821     EISSN: None     Source Type: Journal    
DOI: 10.2320/matertrans1989.38.451     Document Type: Article

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