Fabrication technology of piezoresistive conductive PDMS for micro fingerprint sensors

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2007, Pages 251-254

  Lu, Miao ^a   Bermak, Amine ^a   Lee, Yi Kuen ^a  

^a HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; FABRICATION; MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; OPTICAL DESIGN; REACTIVE ION ETCHING; SEMICONDUCTOR DEVICES; SENSORS;

FABRICATING PROCESSES; FABRICATION TECHNOLOGIES; FINGERPRINT SENSORS; GAUGE FACTORS; INTERNATIONAL CONFERENCES; MICRO-ELECTRO MECHANICAL SYSTEMS; PARYLENE; PIEZORESISTIVE; PIEZORESISTIVITY;

PHOTORESISTS;

EID: 52249123455     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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