MEMS sensor for in situ TEM atomic force microscopy

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2007, Pages 103-106

  Nafari, A ^a,b   Karlen, D ^a,b   Rusu, C ^c   Svensson, K ^a   Olin, H ^d   Enoksson, P ^a  

^a CHALMERS UNIVERSITY OF TECHNOLOGY   (Sweden)

^b Nanofactory Instruments   (Sweden)

^c Imego AB The Institute of Micro and Nanotechnology   (Sweden)

^d MID SWEDEN UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; FORCE MEASUREMENT; TRANSMISSION ELECTRON MICROSCOPY;

DEEP REACTIVE ION ETCH; DESIGN CHALLENGES; HIGH SENSITIVITY; MEMS SENSORS; MICROMACHINING TECHNIQUES; NANO-SCALE SYSTEM; OXIDE GROWTH; SPRING CONSTANTS;

MEMS;

EID: 52249110181     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/memsys.2007.4433025     Document Type: Conference Paper

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