SCOPUS 정보 검색 플랫폼

Volumn 123-124, Issue , 2005, Pages 44-49

A micromachined nanoindentation force sensor

Author keywords

Capacitive detection; Force sensor; Interchangeable tip; Microfabrication; Nanoindentation; Transmission electron microscope

Indexed keywords

CAPACITANCE; FABRICATION; FORCE MEASUREMENT; INDENTATION; NANOTECHNOLOGY; TRANSMISSION ELECTRON MICROSCOPY;

FORCE SENSORS; FREQUENCY TESTS; NANOINDENTATION; PIEZOELECTRIC POSITIONING SYSTEM;

SENSORS;

EID: 24944573848 PISSN: 09244247 EISSN: None Source Type: Journal
DOI: 10.1016/j.sna.2005.03.068 Document Type: Conference Paper

Times cited : (23)

References (12)

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