Promotion effect of iodization on carbonization for MEMS application

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2007, Pages 243-246

  Yoshioka, Ken ^a   Naka, Keisuke ^a   Konishi, Satoshi ^a  

^a RITSUMEIKAN UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CARBONIZATION; ELECTROCHEMICAL ELECTRODES; IODINE; POLYMERS; PYROLYSIS;

IODINE TREATMENT; MEMS APPLICATIONS; PARYLENE C; PROCESS TEMPERATURE; PROMOTION EFFECTS; PYROLYSIS TEMPERATURE; PYROLYZED POLYMERS; STRUCTURAL CHARACTERIZATION;

MEMS;

EID: 52249100553     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/memsys.2007.4433058     Document Type: Conference Paper

References (12)

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