SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 45, Issue 9 A, 2006, Pages 7036-7043

Annealing-induced modification of superhard conductive carbon film

(3) Tsuchitani, Shigeki a Kaneko, Reizo a Hirono, Shigeru b

a WAKAYAMA UNIVERSITY (Japan)

b NTT CORPORATION (Japan)

Author keywords

Amorphous carbon; Conducting AFM; Disorder; ECR sputtering; Poole Frenkel conduction; Raman spectrosoopy; Thermal annealing; XPS

Indexed keywords

ANNEALING; CHEMICAL MODIFICATION; DEFECTS; ELECTRON CYCLOTRON RESONANCE; MICROSTRUCTURE; RAMAN SPECTROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

AMORPHOUS CARBON; CARBON FILMS; CONDUCTING AFM; DISORDER; ECR SPUTTERING; POOLE-FRENKEL CONDUCTION; THERMAL ANNEALING;

AMORPHOUS FILMS;

EID: 33749026909 PISSN: 00214922 EISSN: 13474065 Source Type: Journal
DOI: 10.1143/JJAP.45.7036 Document Type: Article

Times cited : (4)

References (29)

1
- 30244535151
- J. Robertson and E. P. O'Reilly: Phys. Rev. B 35 (1987) 2946.
- (1987) Phys. Rev. B , vol.35 , pp. 2946
- Robertson, J.¹ O'Reilly, E.P.²

2
- 0000800377
- J. Robertson: Phys. Rev. Lett. 68 (1992) 220.
- (1992) Phys. Rev. Lett. , vol.68 , pp. 220
- Robertson, J.¹

3
- 0001327570
- M. Chhowalla, A. C. Ferrari, J. Robertson and O. A. J. Amaratunga: Appl. Phys. Lett. 76 (2000) 1419.
- (2000) Appl. Phys. Lett. , vol.76 , pp. 1419
- Chhowalla, M.¹ Ferrari, A.C.² Robertson, J.³ Amaratunga, O.A.J.⁴

4
- 0242603790
- A. C. Ferrari and J. Robertson: Phys. Rev. B 61 (2000) 14095.
- (2000) Phys. Rev. B , vol.61 , pp. 14095
- Ferrari, A.C.¹ Robertson, J.²

5
- 0000280122
- I. Alexandrou, H. J. Scheibe, C. J. Kiely, A. J. Papworth, G. A. J. Amaratunga and B. Schultrich: Phys. Rev. B 60 (1999) 10903.
- (1999) Phys. Rev. B , vol.60 , pp. 10903
- Alexandrou, I.¹ Scheibe, H.J.² Kiely, C.J.³ Papworth, A.J.⁴ Amaratunga, G.A.J.⁵ Schultrich, B.⁶

6
- 79955999999
- S. Hirono, S. Umemura, M. Tomita and R. Kaneko: Appl. Phys. Lett. 80 (2002) 425.
- (2002) Appl. Phys. Lett. , vol.80 , pp. 425
- Hirono, S.¹ Umemura, S.² Tomita, M.³ Kaneko, R.⁴

7
- 10944235811
- S. Hirono, S. Umemura, M. Tomita and R. Kaneko: Mol. Cryst. Liq. Cryst. 386 (2002) 179.
- (2002) Mol. Cryst. Liq. Cryst. , vol.386 , pp. 179
- Hirono, S.¹ Umemura, S.² Tomita, M.³ Kaneko, R.⁴

8
- 0001451626
- R. Kalish, Y. Lifshitz, K. Nugent and S. Prawer: Appl. Phys. Lett. 74 (1999) 2936.
- (1999) Appl. Phys. Lett. , vol.74 , pp. 2936
- Kalish, R.¹ Lifshitz, Y.² Nugent, K.³ Prawer, S.⁴

9
- 0001316340
- A. C. Ferrari, B. Kleinsorge, N. A. Morrison, A. Hart, V. Stolojan and J. Robertson: J. Appl. Phys. 85 (1999) 7191.
- (1999) J. Appl. Phys. , vol.85 , pp. 7191
- Ferrari, A.C.¹ Kleinsorge, B.² Morrison, N.A.³ Hart, A.⁴ Stolojan, V.⁵ Robertson, J.⁶

10
- 0034089607
- L. G. Jacobsohn, R. Prioli, F. L. Freire, Jr., G. Mariotto, M. M. Lacerda and Y. W. Chung: Diamond Relat. Mater. 9 (2000) 680.
- (2000) Diamond Relat. Mater. , vol.9 , pp. 680
- Jacobsohn, L.G.¹ Prioli, R.² Freire Jr., F.L.³ Mariotto, G.⁴ Lacerda, M.M.⁵ Chung, Y.W.⁶

11
- 0001035312
- W. Lu, K. Komvopoulos and S. W. Yeh: J. Appl. Phys. 89 (2001) 2422.
- (2001) J. Appl. Phys. , vol.89 , pp. 2422
- Lu, W.¹ Komvopoulos, K.² Yeh, S.W.³

12
- 0000448974
- V. I. Merkulov, J. S. Lannin, C. H. Munro, S. A. Asher, V. S. Veerasamy and W. I. Milne: Phys. Rev. Lett. 78 (1997) 4869.
- (1997) Phys. Rev. Lett. , vol.78 , pp. 4869
- Merkulov, V.I.¹ Lannin, J.S.² Munro, C.H.³ Asher, S.A.⁴ Veerasamy, V.S.⁵ Milne, W.I.⁶

13
- 0037798014
- J. Díaz, G. Paolicelli, S. Ferrer and F. Comin: Phys. Rev. B 54 (1996) 8064.
- (1996) Phys. Rev. B , vol.54 , pp. 8064
- Díaz, J.¹ Paolicelli, G.² Ferrer, S.³ Comin, F.⁴

14
- 0037081439
- R. Haerle, E. Riedo, A. Pasquarello and A. Baldereschi: Phys. Rev. B 65 (2002) 45101.
- (2002) Phys. Rev. B , vol.65 , pp. 45101
- Haerle, R.¹ Riedo, E.² Pasquarello, A.³ Baldereschi, A.⁴

15
- 30644467202
- J. O. Orwa, I. Andrienko, J. L. Peng, S. Prawer, Y. B. Zhang and S. P. Lau: J. Appl. Phys. 96 (2004) 6286.
- (2004) J. Appl. Phys. , vol.96 , pp. 6286
- Orwa, J.O.¹ Andrienko, I.² Peng, J.L.³ Prawer, S.⁴ Zhang, Y.B.⁵ Lau, S.P.⁶

16
- 0021479595
- T. Ono, C. Takahashi and S. Matsuo: Jpn. J. Appl. Phys. 23 (1984) L534.
- (1984) Jpn. J. Appl. Phys. , vol.23
- Ono, T.¹ Takahashi, C.² Matsuo, S.³

17
- 0032118008
- S. Hirono, S. Umemura, Y. Ando, T. Hayashi and R. Kaneko: IEEE Trans. Magn. 34 (1998) 1729.
- (1998) IEEE Trans. Magn. , vol.34 , pp. 1729
- Hirono, S.¹ Umemura, S.² Ando, Y.³ Hayashi, T.⁴ Kaneko, R.⁵

18
- 0035883545
- J. Díaz, S. Anders, X. Zhou, E. J. Moler, S. A. Kellar and Z. Hussain: Phys. Rev. B 64 (2001) 125204.
- (2001) Phys. Rev. B , vol.64 , pp. 125204
- Díaz, J.¹ Anders, S.² Zhou, X.³ Moler, E.J.⁴ Kellar, S.A.⁵ Hussain, Z.⁶

19
- 0001628226
- T. E. Doyle and J. R. Dennison: Phys. Rev. B 51 (1995) 196.
- (1995) Phys. Rev. B , vol.51 , pp. 196
- Doyle, T.E.¹ Dennison, J.R.²

20
- 36749120046
- I. Harada, Y. Furukawa, M. Tasumi, H. Shirakawa and S. Ikeda: J. Chem. Phys. 73 (1980) 4746.
- (1980) J. Chem. Phys. , vol.73 , pp. 4746
- Harada, I.¹ Furukawa, Y.² Tasumi, M.³ Shirakawa, H.⁴ Ikeda, S.⁵

21
- 0014829099
- F. Tuinstra and J. L. Koenig: J. Chem. Phys. 53 (1970) 1126.
- (1970) J. Chem. Phys. , vol.53 , pp. 1126
- Tuinstra, F.¹ Koenig, J.L.²

22
- 2042524576
- Y. Wang, D. C. Alsmeyer and R. L. McCreery: Chem. Mater. 2 (1990) 557.
- (1990) Chem. Mater. , vol.2 , pp. 557
- Wang, Y.¹ Alsmeyer, D.C.² McCreery, R.L.³

23
- 33750901188
- D. G. McCulloch, S. Prawer and A. Hoffman: Phys. Rev. B 50 (1994) 5905.
- (1994) Phys. Rev. B , vol.50 , pp. 5905
- McCulloch, D.G.¹ Prawer, S.² Hoffman, A.³

24
- 0021603803
- P. Lespade, A. Marchand, M. Couzi and F. Cruege: Carbon 22 (1984) 375.
- (1984) Carbon , vol.22 , pp. 375
- Lespade, P.¹ Marchand, A.² Couzi, M.³ Cruege, F.⁴

25
- 0024620920
- D. S. Knight and W. B. White: J. Mater. Res. 4 (1989) 385.
- (1989) J. Mater. Res. , vol.4 , pp. 385
- Knight, D.S.¹ White, W.B.²

26
- 33645143382
- R. O. Dillon, J. A. Woollam and V. Katkanant: Phys. Rev. B 29 (1984) 3482.
- (1984) Phys. Rev. B , vol.29 , pp. 3482
- Dillon, R.O.¹ Woollam, J.A.² Katkanant, V.³

27
- 0000764215
- H. H. Poole: London Edinburgh Dublin Philos. Mag. 33 (1916) 112.
- (1916) London Edinburgh Dublin Philos. Mag. , vol.33 , pp. 112
- Poole, H.H.¹

28
- 26344462977
- J. Frenkel: Phys. Rev. 54 (1938) 647.
- (1938) Phys. Rev. , vol.54 , pp. 647
- Frenkel, J.¹

29
- 0004005306
- (Wiley, New York), 2nd ed.
- S. M. Sze: Physics of Semiconductor Devices (Wiley, New York, 1981) 2nd ed.
- (1981) Physics of Semiconductor Devices
- Sze, S.M.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.