Three dimensional dielectrophoretic assembly of single-walled carbon nanotubes for integrated circuit interconnects

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2007, Pages 823-826

  Khanduja, Nishant ^b   Selvarasah, Selvapraba ^b   Makaram, Prashanth ^b   Chen, Chia Ling ^a,b   Busnaina, Ahmed ^b   Dokmeci, Mehmet R ^a,b  

^a IEEE

^b NORTHEASTERN UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROPHORESIS; INTEGRATED CIRCUIT INTERCONNECTS; MEMS; NANOTUBES; TIMING CIRCUITS;

CONDUCTIVE NANOSTRUCTURE; DIELECTROPHORETIC ASSEMBLY; DIRECTED ASSEMBLY; ENCAPSULATION LAYER; INTERLEVEL DIELECTRIC; SINGLE-WALLED CARBON NANOTUBE (SWNTS); THREE-DIMENSIONAL (3D) ASSEMBLY; THREE-MASK PROCESS;

SINGLE-WALLED CARBON NANOTUBES (SWCN);

EID: 52249088616     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/memsys.2007.4433002     Document Type: Conference Paper

References (24)

1. S. Iijima, "Helical microtubules of graphitic carbon," Nature, vol. 354, pp. 56-58, 1991.
2. R. Martel, T. Schmidt, H. R. Shea, T. Hertel and P. H. Avouris, "Single- and multi-wall carbon nanotube field-effect transistors", Applied Physics Letters, vol. 73, pp. 2447-2449, 1998.
3. R. Martel, V. Derycke, S. Wind, J. Appenzeller, and P. H. Avouris, "Carbon nanotube field-effect transistors and logic circuits", Proc. of the 39th conference of Design Automation, New Orleans, USA, pp. 94-98, 2002.
4. F. Kreupl, A. P. Graham, G. S. Duesberg, W. Steinhogl, M. Liebau, E. Unger and W. Honlein, "Carbon nanotubes in interconnect applications," Microelectron. Eng., vol. 64, pp. 399-408, 2002.
5. L. Zhu, Y. Xiu, D. W. Hess, and C. P. Wong, "Growth of aligned carbon nanotube arrays for electrical interconnect", Proc. of the 7th Electronic Packaging Technology Conference, Singapore, pp. 646-51, 2005.
6. Z. Chen, Y. Yang, F. Chen, Q. Qing, Z. Z. Wu and Z. Liu, "Controllable interconnection of single-walled carbon nanotubes under ac field," Journal of Phys. Chem. B Lett., vol. 109, pp. 11420-11423, 2005.
7. Z. Chen, G. Cao, Z. Lin, I. Koehler and P. Bachmann, "A self-assembled synthesis of carbon nanotubes for interconnects," Nanotechnology, vol. 17, pp. 1062-1066, 2006.
8. E. Artukovic, M. Kaempgen, D. S. Hecht, S. Roth and G. Gruner, "Transparent and flexible carbon nanotube transistors," Nano Letters, vol. 5, pp. 757-760, 2005.
9. A. Bachtold, P. Hadley, T. Nakanishi, C. Dekker, "Logic circuits with carbon nanotube transistors", Science, vol. 294, pp. 1317-1320, 2001.
10. V. Derycke , R. Martel, J. Appenzeller, and P. H. Avouris, "Carbon nanotube inter- and intramolecular logic gates", Nano Letters, vol. 1, pp. 453-6, 2001.
11. th IEEE Conf. on Nanotechnology, Munich, Germany, pp. 158-160, 2004.
12. Y. T. Jang, C. H. Choi, B. K. Ju, J. H. Ahn, Y. H. Lee, "Gated field emitter using carbon nanotubes for vacuum microelectronic devices," Digest Tech. Papers MEMS'03, Kyoto, Japan, pp. 37-40, 2003.
13. M. Nihei, M. Horibe, A. Kawabata, and Y. Awano, "Carbon nanotube vias for future LSI interconnects," Proc. Interconnect Technology Conference, Burlingame, CA, USA, pp. 251-53, 2004.
14. G. S. Duesberg, A. P. Graham, F. Kreupl, M. Liebau, R. Seidel, E. Unger, and W. Honlein, "Ways towards the scaleable integration of carbon nanotubes into silicon based technology," Diamond and Related Materials, vol. 13, pp. 354-61, 2004.
15. J. Li, Q. Ye, A, Cassell, H. T. Ng, R. Stevens, J. Han and M. Meyyappan, "Bottom-up approach for carbon nanotube interconnects," Applied Physics Letters, vol. 82, pp. 2491-2493, 2003.
16. Y. Li, D. Mann, M. Rolandi, W. Kim, A. Ural, S. Hung, A. Javey, J. Cao, D. Wang, E. Yenilmez, Q. Wang, J. F. Gibbons, Y. Nishi, and H. Dai, "Preferential growth of semiconducting single-walled carbon nanotubes by a plasma enhanced CVD method", Nano Letters, vol. 4, pp. 317-21, 2004.
17. H. A. Pohl, Dielectrophoresis, Cambridge University Press, NY, USA, 1978.
18. K. D. Hermanson, S. O. Lumsdon, J. P. Williams, E. W. Kaler, O. D. Velev, "Dielectrophoretic assembly of electrically functional microwires from nanoparticle suspensions," Science, vol. 294, pp. 1082-1086, 2001.
19. R. Krupke, F. Hennrich, H. V. Lohneysen, and M. M. Kappes, "Separation of metallic from semiconducting single-walled carbon nanotubes," Science, vol. 301, pp. 344-347, 2003.
20. R. H. M. Chan, C. K. M. Fung, and W. J. Li, "Rapid assembly of carbon nanotubes for nanosensiong by dielectrophoretic force," Nanotechnol., vol. 15, pp. S672-S677, 2004.
21. M. Washizu and O. Kurosawa, "Electrostatic manipulation of DNA in microfabricated structures," IEEE Trans. on Industry Appl., vol. 26, pp. 1165-1172, 1990.
22. L. Zheng, J. P. Brody, and P. J. Burke, "Electronic manipulation of DNA, proteins, and nanoparticles for potential circuit assembly," Biosensors and Bioelectron., vol. 20, pp. 606-619, 2004.
23. I. Amlani, A. M. Rawlett, L. A. Nagahara, and R. K. Tsui, "An approach to transport measurements of electronic molecules," Applied Physics Letters, vol. 80, pp. 2761-2763, 2002.
24. R. Kretschmer, and W. Fritzsche, "Manipulation of metal nanoparticles in micrometer electrode gaps by dielectrophoresis," American Inst. of Phys. Conf. Proc., vol. 725, pp. 85-87, 2004.