A self-assembled synthesis of carbon nanotubes for interconnects

Nanotechnology

Volumn 17, Issue 4, 2006, Pages 1062-1066

  Chen, Zexiang ^a   Cao, Guichuan ^a   Lin, Zulun ^a   Koehler, Irmgard ^b   Bachmann, Peter K ^b  

^a UNIVERSITY OF ELECTRONIC SCIENCE AND TECHNOLOGY OF CHINA   (China)

^b PHILIPS RESEARCH LABORATORIES   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CATALYSTS; INTEGRATED CIRCUITS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SCANNING ELECTRON MICROSCOPY; SELF ASSEMBLY; SUBSTRATES;

ELECTRUC CONTACTS; INTERCONNECTS; QUANTUM LIMIT CONDUCTANCE; SELF-ASSEMBLED SYNTHESIS;

CARBON NANOTUBES;

EID: 31944432046     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/17/4/036     Document Type: Article

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