Dynamic testing technology of microstructure in microelectromechanial systems

Zhongguo Jixie Gongcheng/China Mechanical Engineering

Volumn 16, Issue 1, 2005, Pages 83-88

  Wang, Tao ^a   Wang, Xiaodong ^a   Wang, Liding ^a   Liu, Chong ^a  

^a DALIAN UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

Dynamic test; MEMS; Microstructure; Optical testing

Indexed keywords

EID: 14344256413     PISSN: 1004132X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (29)