Design rules for single-mode and polarization-independent silicon-on-insulator rib waveguides using stress engineering

Journal of Lightwave Technology

Volumn 26, Issue 13, 2008, Pages 1840-1846

  Milošević, Milan M ^a   Matavulj, Petar S ^a   Timotijević, Branislav D ^b   Reed, Graham T ^c   Mashanovich, Goran Z ^c  

^a University of Belgrade   (Serbia)

^b UNIVERSITY OF BELGRADE   (Serbia)

^c UNIVERSITY OF SURREY   (United Kingdom)

Author keywords

Birefringence; Finite element methods; Materials; Mathematical model; Optical waveguides; Polarization independence; Refractive index; Rib waveguides; Silicon; Silicon photonics; Single mode; Stress

Indexed keywords

BIREFRINGENCE; CLADDING (COATING); INTEGRATED OPTOELECTRONICS; LAWS AND LEGISLATION; MICROSENSORS; MOLECULAR BEAM EPITAXY; NONMETALS; OPTICAL PROPERTIES; OPTICAL WAVEGUIDES; PHOTONIC DEVICES; PHOTONICS; POLARIZATION; SILICON; TECHNOLOGY;

COVER THICKNESS; DESIGN RULES; ETCH DEPTH; FINITE ELEMENT METHODS; LARGE CROSS SECTIONS; MATERIALS; MATHEMATICAL MODEL; OPTICAL-; PHOTONIC CIRCUITS; POLARIZATION INDEPENDENCE; POLARIZATION-INDEPENDENT; REFRACTIVE INDEX; RIB WAVEGUIDES; SIDE-WALL-ANGLE; SILICON PHOTONICS; SILICON-ON -INSULATOR; SILICON-ON-INSULATOR WAVEGUIDES; SINGLE MODE; SINGLE MODES; STRESS; STRESS ENGINEERING; STRESS-INDUCED; SUPERIOR PERFORMANCE; WAVEGUIDE BIREFRINGENCE;

WAVEGUIDES;

EID: 52149087228     PISSN: 07338724     EISSN: None     Source Type: Journal    
DOI: 10.1109/JLT.2008.922193     Document Type: Article

References (33)

1. R. A. Soref, S. J. Emelett, and W. R. Buchwald, "Silicon waveguided components for the long-wave infrared region," J. Opt. A, Pure Appl. Opt., vol. 8, no. 10, pp. 840-848, Jul. 2006.
2. C. Gunn, "CMOS photonics: SOI learns a new trick," in Proc. IEEE Int. SOI Conf., New York, Oct. 2005, pp. 7-13.
3. H. Rong, R. Jones, A. Liu, O. Cohen, D. Hak, A. Fang, and M. Paniccia, "A continuous-wave Raman silicon laser," Nature, vol. 433, pp. 725-728, Feb. 2005.
4. A. Liu, L. Liao, D. Rubin, H. Nguyen, B. Ciftcioglu, Y. Chetrit, N. Izhaku, and M. Paniccia, "High-speed optical modulation based on carrier depletion in a silicon waveguide," Opt. Exp., vol. 15, no. 2, pp. 660-668, Jan. 2007.
5. P. Dumon, W. Bogaerts, D. Van Thourhout, D. Taillaert, R. Baets, J. Wouters, S. Beckx, and P. Jaenen, "Compact wavelength router based on a silicon-on-insulator arrayed waveguide grating pigtailed to a fiber array," Opt. Exp., vol. 14, no. 2, pp. 664-669, Jan. 2006.
6. Y. Nasu, M. Kohtoku, and Y. Hibino, "Low-loss waveguides written with a femtosecond laser for flexible interconnection in a planar lightwave circuit," Opt. Lett., vol. 30, no. 7, pp. 723-725, Apr. 2005.
7. P. Dumon, W. Bogaerts, V.Wiaux, J.Wouters, S. Beckx, J. Van Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. Van Thourhout, and R. Baets, "Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography," IEEE Photon. Technol. Lett., vol. 16, no. 5, pp. 1328-1330, May 2004.
8. T. K. Liang, L. R. Nunes, T. Sakamoto, K. Sasagawa, T. Kawanishi, M. Tsuchiya, G. R. A. Priem, D. V. Thourhout, P. Dumon, R. Baets, and H. K. Tsang, "Ultrafast all-optical switching by cross-absorption modulationin silicon wire waveguides," Opt. Exp., vol. 13, no. 19, pp. 7298-7303, Sep. 2005.
9. 2," IEEE J. Quantum Electron., vol. 27, no. 8, pp. 1971-1974, Aug. 1991.
10. S. P. Pogossian, L. Vescan, and A. Vonsovici, "The single-mode condition for semiconductor rib waveguides with large cross section," J. Lightw. Technol., vol. 16, no. 10, pp. 1851-1853, Oct. 1998.
11. O. Powell, "Single-mode condition for silicon rib waveguides," J. Lightw. Technol., vol. 20, no. 10, pp. 1851-1855, Oct. 2002.
12. L. Vivien, S. Laval, B. Dumont, S. Lardenois, A. Koster, and E. Cassan, "Polarization-independent single-mode rib waveguides on silicon-on-insulator for telecommunication wavelengths," Opt. Commun., vol. 210, no. 1-2, pp. 43-49, Sep. 2002.
13. J. Lousteau, D. Furniss, A. Seddon, T. M. Benson, A. Vuković, and P. Sewell, "The single mode condition for silicon-on-insulator optical rib waveguides with large cross section," J. Lightw. Technol., vol. 22, no. 8, pp. 1923-1929, Aug. 2004.
14. S. P. Chan, C. E. Png, S. T. Lim, V. M. N. Passaro, and G. T. Reed, "Single mode and polarization independent SOI waveguides with small cross section," J. Lightw. Technol., vol. 23, no. 6, pp. 1573-1582, Jun. 2005.
15. G. Z. Mashanovich, M. Milosevic, P. Matavulj, S. Stankovic, B. Timotijevic, P. Y. Yang, E. J. Teo, M. B. H. Breese, A. A. Bettiol, and G. T. Reed, "Silicon photonic waveguides," Semicon. Scien. Technol. to be published.
16. W. N. Ye, D.-X. Xu, S. Janz, P. Cheben, M.-J. Picard, B. Lamontagne, and N. G. Tarr, "Birefringence control using stress engineering in silicon-on-insulator (SOI) waveguides," J. Lightw. Technol., vol. 23, no. 3, pp. 1308-1318, Mar. 2005.
17. M. M. Milošević, P. S. Matavulj, and G. Z. Mashanovich, "Stress-induced characteristics of silicon-on-insulator rib waveguides," in Proc. 15th Telecommun. Forum TELFOR, Belgrade, Serbia, Nov. 2007, pp. 401-404.
18. S. Stanković, M. Milošević, B. Timotijević, P. Y. Yang, E. J. Teo, J. Crnjanski, P. Matavulj, and G. Z. Mashanovich, "Silicon photonic waveguides for near- and mid- infrared regions," Acta Phys. Polonica A, vol. 112, no. 5, pp. 1019-1024, Nov. 2007.
19. W. R. Headley, G. T. Reed, M. Pannicia, A. Liu, and S. Howe, "Polarization-independent optical racetrack resonators using rib waveguides in silicon-on-insulator," Appl. Phy. Lett., vol. 85, no. 23, pp. 5523-5525, Dec. 2004.
20. B. D. Timotijevic, F. Y. Gardes, W. R. Headley, G. T. Reed, M. J. Paniccia, O. Cohen, D. Hak, and G. Z. Masanovic, "Multi-stage racetrack resonator filters in silicon-on-insulator," J. Opt. A, Pure Appl. Opt., vol. 8, no. 7, pp. S473-S476, Jul. 2006.
21. K. Kawano and T. Kitoh, Introduction to Optical Waveguide Analysis: Solving Maxwell's Equation and the Schrödinger Equation. New York: Wiley, 2001.
22. R. Scarmozzino, A. Gopinath, R. Pregla, and S. Helfert, "Numerical techniques for modeling guided-wave photonic devices," IEEE J. Sel. Topics Quantum Electron., vol. 6, no. 1, pp. 150-162, Jan./Feb. 2000.
23. FEMLAB COMSOL, Inc., Burlington, MA Online. Available: www.comsol.com
24. Beamprop Rsoft Design Group, Inc., Ossining, NY [Online]. Available: www.rsoftdesign.com
25. M. Huang, "Stress effects on the performance of optical waveguides," Int. J. Sol. Structures, vol. 40, no. 7, pp. 1615-1632, Apr. 2003.
26. K. Okamoto, T. Hosaka, and T. Edahiro, "Stress analysis of optical fibers by a finite element method," IEEE J. Quantum Electron., vol. QE-17, no. 10, pp. 2123-2129, Oct. 1981.
27. M. Okuno, A. Sugita, K. Jinguji, and M. Kawachi, "Birefringence control of silica waveguides on Si and its application to a polarization-beam splitter/swich," J. Lightw. Technol., vol. 12, no. 4, pp. 625-633, Apr. 1994.
28. K. Saitoh, M. Koshiba, and Y. Tsuji, "Stress analysis method for elastically anisotropic material based optical waveguides and its application to stess-induced optical waveguides," J. Lightw. Technol., vol. 17, no. 2, pp. 255-259, Feb. 1999.
29. D.-X. Xu, P. Cheben, D. Dalacu, A. Delage, S. Janz, B. Lamontagne, M.-J. Picard, and W. N. Ye, "Eliminating the birefringence in silicon-on-insulator ridge waveguides by use of cladding stress," Opt. Lett., vol. 29, no. 20, pp. 2384-2386, Oct. 2004.
30. W. N. Ye, D. X. Xu, S. Janz, P. Cheben, A. Delage, M.-J. Picard, B. Lamontagne, and G. T. Tarr, "Stress-induced birefringence in silicon-on-insulator (SOI) waveguides," in Proc. SPIE-Int. Soc. Opt. Eng., Jul. 2004, vol. 5357, pp. 57-66.
31. S. Timoshenko and J. N. Goodier, Theory of Elasticity, 2nd ed. New York: McGraw-Hill, 1951.
32. L. D. Landau and E. M. Lifshitz, Theory of Elasticity, 2nd ed. Oxford, U.K.: Pergamon, 1970.
33. B. D. Timotijevic, "Auto-regressive optical filters in silicon-on-insulator waveguides," Ph.D. dissertation, Adv. Technol. Inst., Univ. Surrey, Guildford, U.K., 2007.