Stress-induced birefringence in silicon-on-insulator (SOI) waveguides

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5357, Issue , 2004, Pages 57-66

  Ye, Winnie N ^a,b   Xu, Dan Xia ^b   Janz, Siegfried ^b   Cheben, Pavel ^b   Delâge, André ^b   Picard, Marie Josée ^b   Lamontagne, Boris ^b   Tarr, N Garry ^a  

^a CARLETON UNIVERSITY   (Canada)

^b NATIONAL RESEARCH COUNCIL CANADA   (Canada)

Author keywords

Arrayed waveguide gratings (AWG); Birefringence; Silicon on insulator (SOI); Stress; Waveguides

Indexed keywords

ARRAYED WAVEGUIDE GRATINGS (AWG); HIGH INDEX CONTRAST MATERIALS; SILICON-ON-INSULATOR (SOI); SOI WAVEGUIDE;

BIREFRINGENCE; CLADDING (COATING); COMPUTER SIMULATION; DEMULTIPLEXING; DIFFRACTION GRATINGS; FINITE ELEMENT METHOD; INTEGRATED OPTICS; LIGHT POLARIZATION; OPTICAL COMMUNICATION; OPTICAL WAVEGUIDES; PARAMETER ESTIMATION; SILICON COMPOUNDS; STRESS ANALYSIS;

SILICON ON INSULATOR TECHNOLOGY;

EID: 4344600905     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.529602     Document Type: Conference Paper

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