Linear Variable Reluctance (VR) micro motors with compensated attraction force: Concept, simulation, fabrication and test

IEEE Transactions on Magnetics

Volumn 43, Issue 6, 2007, Pages 2567-2569

  Feldmann, M ^a   Buttgenbach S ^a  

^a TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

Author keywords

ED photo resist; Epon SU 8; Micro coils; UV depth lithography; Variable reluctance micro actuator

Indexed keywords

COMPUTER SIMULATION; ELECTRIC COILS; ELECTROPLATED PRODUCTS; LITHOGRAPHY; MAGNETIC FLUX; MICROSTRUCTURE;

ED-PHOTO RESISTS; ELECTROMAGNETIC ACTUATOR SYSTEMS; EPON SU-8; MICRO COILS; UV-DEPTH LITHOGRAPHY; VARIABLE RELUCTANCE MICRO ACTUATORS;

ELECTRIC MOTORS;

EID: 34249028188     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMAG.2007.894047     Document Type: Article

References (6)

1. H. H. Gatzen, H.-D. Stölting, S. Büttgenbach, and H. Dimigen, "Novel variable reluctance micromotor for linear actuation," in Actuator 2000, 2000, vol. 1, p. 363.
2. J. Edler, H.-D. Stölting, M. Föhse, and H. H. Gatzen, "A linear microactuator with enhanced design," Microsystem Technologies, vol. 7, no. 5-6, p. 261, 2002.
3. S. D. Collins, "Micro photonics system implementation," in Transducers 99, 1999, vol. 1, pp. 124-127.
4. R. Gehrking, S. Demmig, B. Ponick, M. Feldmann, and S. Büttgenbach, "A micro linear motor with integrated passive magnetic guidance," in Proc. IECON 2006, Paris, Frankreich, 2006, pp. 1245-1250.
5. M. Feldmann, A. Waldschik, and S. Büttgenbach:, "Technology and application of electro-depositable photo resists to create uniform coatings needed for complex 3-D micro actuators and sensors," in Microsystem Technologies. Berlin, Heidelberg: Springer, 2006, pp. s.1-s.6.
6. V. Seidemann, J. Edler, S. Büttgenbach, and H.-D. Stölting, "Linear variable reluctance (VR) micro motor with horizontal flux guidance: Concept, simulation," in Fabrication and Test-Transducers '03, 2003, pp. 1415-1418.