Development and evaluation of an active magnetic guide for microsystems with an integrated air gap measurement system

IEEE Transactions on Magnetics

Volumn 43, Issue 6, 2007, Pages 2716-2718

  Ruffert, Christine ^a   Li, Jixiang ^a   Denkena, Berend ^a   Gatzen, Hans H ^a  

^a LEIBNIZ UNIVERSITY HANNOVER   (Germany)

Author keywords

Electromagnetic drive; Linear micromotor; Magnetic levitation; Microassembly

Indexed keywords

ELECTRIC DRIVES; ELECTRIC MOTORS; ELECTROMAGNETISM; MAGNETIC LEVITATION;

AIR GAP MEASUREMENT SYSTEM; CAPACITIVE MEASUREMENT SYSTEMS; MAGNETIC GUIDE; MICROASSEMBLY;

MICROSYSTEMS;

EID: 34249055554     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMAG.2007.893779     Document Type: Article

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