Water-assisted femtosecond laser machining of electrospray nozzles on glass microfluidic devices

Optics Express

Volumn 16, Issue 19, 2008, Pages 15206-15211

  An, Ran ^a   Hoffman, Michelle D ^a   Donoghue, Margaret A ^a   Hunt, Alan J ^a   Jacobson, Stephen C ^a,b  

^a UNIVERSITY OF MICHIGAN   (United States)

^b INDIANA UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FLUIDIC DEVICES; GLASS; MASS SPECTROMETRY; MICROFLUIDICS; ULTRASHORT PULSES;

DEVICE ASSEMBLIES; FEMTOSECOND LASER MACHINING; GLASS COVERSLIPS; GLASS MICROFLUIDIC DEVICES; GLASS SURFACES; MICRO-FLUIDIC DEVICES; PRESSURE-DRIVEN FLOWS; WATER ASSISTED;

NOZZLE DESIGN;

GLASS; WATER;

ARTICLE; CHEMISTRY; ELECTRICITY; EQUIPMENT; EQUIPMENT DESIGN; FLOW INJECTION ANALYSIS; INSTRUMENTATION; LASER; MICROFLUIDIC ANALYSIS; RADIATION EXPOSURE;

ELECTROSTATICS; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; FLOW INJECTION ANALYSIS; GLASS; LASERS; MICROFLUIDIC ANALYTICAL TECHNIQUES; WATER;

EID: 51849132067     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.16.015206     Document Type: Article

References (27)

1. R. S. Ramsey and J. M. Ramsey, "Generating electrospray from microchip devices using electroosmotic pumping," Anal. Chem. 69, 1174-1178 (1997).
2. Q. Xue, F. Foret, Y. M. Dunayevskiy, P. M. Zavracky, N. E. McGruer, and B. L. Karger, "Multichannel microchip electrospray mass spectrometry," Anal. Chem. 69, 426-430 (1997).
3. I. M. Lazar, J. Grym, and F. Foret, "Microfabricated devices: A new sample introduction approach to mass spectrometry," Mass Spectrom. Rev. 25, 573-594 (2006).
4. S. Koster and E. Verpoorte, "A decade of microfluidic analysis coupled with electrospray mass spectrometry: An overview," Lab Chip 7, 1394-1412 (2007).
5. L. Licklider, X. Q. Wang, A. Desai, Y. C. Tai, and T. D. Lee, "A micromachined chip-based electrospray source for mass spectrometry," Anal. Chem. 72, 367-375 (2000).
6. G. A. Schultz, T. N. Corso, S. J. Prosser, and S. Zhang, "A fully integrated monolithic microchip electrospray device for mass spectrometry," Anal. Chem. 72, 4058-4063 (2000).
7. M. Schilling, W. Nigge, A. Rudzinski, A. Neyer, and R. Hergenroder, "A new on-chip ESI nozzle for coupling of MS with microfluidic devices," Lab Chip 4, 220-224 (2004).
8. N. F. Yin, K. Killeen, R. Brennen, D. Sobek, M. Werlich, and T. V. van de Goor, "Microfluidic chip for peptide analysis with an integrated HPLC column, sample enrichment column, and nanoelectrospray tip," Anal. Chem. 77, 527-533 (2005).
9. L. Wang, R. Stevens, A. Malik, P. Rockett, M. Paine, P. Adkin, S. Martyn, K. Smith, J. Stark, and P. Dobson, "High-aspect-ratio silica nozzle fabrication for nano-emitter electrospray applications," Microelectron. Eng. 84, 1190-1193 (2007).
10. P. P. Pronko, S. K. Dutta, D. Du, and R. K. Singh, "Thermophysical effects in laser processing of materials with picosecond and femtosecond pulses," J. Appl. Phys. 78, 6233-6240 (1995).
11. E. N. Glezer, M. Milosavljevic, L. Huang, R. J. Finlay, T. H. Her, J. P. Callan, and E. Mazur, "Three-dimensional optical storage inside transparent materials," Opt. Lett. 21, 2023-2025 (1996).
12. C. B. Schaffer, A. Brodeur, J. F. Garcia, and E. Mazur, "Micromachining bulk glass by use of femtosecond laser pulses with nanojoule energy," Opt. Lett. 26, 93-95 (2001).
13. M. D. Perry, B. C. Stuart, P. S. Banks, M. D. Feit, V. Yanovsky, and A. M. Rubenchik, "Ultrashort-pulse laser machining of dielectric materials," J. Appl. Phys. 85, 6803-6810 (1999).
14. C. Momma, S. Nolte, B. N. Chichkov, F. von Alvensleben, and A. Tunnermann, "Precise laser ablation with ultrashort pulses," Appl. Surf. Sci. 110, 15-19 (1997).
15. Y. Li, K. Itoh, W. Watanabe, K. Yamada, D. Kuroda, J. Nishii, and Y. Y. Jiang, "Three-dimensional hole drilling of silica glass from the rear surface with femtosecond laser pulses," Opt. Lett. 26, 1912-1914 (2001).
16. R. An, Y. Li, Y. P. Dou, Y. Fang, H. Yang, and Q. H. Gong, "Laser micro-hole drilling of soda-lime glass with femtosecond pulses," Chin. Phys. Lett. 21, 2465-2468 (2004).
17. Y. Iga, T. Ishizuka, W. Watanabe, K. Itoh, Y. Li, and J. Nishii, "Characterization of micro-channels fabricated by in-water ablation of femtosecond laser pulses," Jpn. J. Appl. Phys. Part 1 43, 4207-4211 (2004).
18. D. J. Hwang, T. Y. Choi, and C. P. Grigoropoulos, "Liquid-assisted femtosecond laser drilling of straight and three-dimensional microchannels in glass," Appl. Phys. A-Mater. Sci. Process. 79, 605-612 (2004).
19. R. An, Y. Li, Y. P. Dou, H. Yang, and Q. H. Gong, "Simultaneous multi-microhole drilling of soda-lime glass by water-assisted ablation with femtosecond laser pulses," Opt. Express 13, 1855-1859 (2005).
20. K. Ke, E. F. Hasselbrink, and A. J. Hunt, "Rapidly prototyped three-dimensional nanofluidic channel networks in glass substrates," Anal. Chem. 77, 5083-5088 (2005).
21. T. N. Kim, K. Campbell, A. Groisman, D. Kleinfeld, and C. B. Schaffer, "Femtosecond laser-drilled capillary integrated into a microfluidic device," Appl. Phys. Lett. 86, 201106 (2005).
22. R. An, Y. Li, Y. Dou, D. Liu, H. Yang, and Q. Gong, "Water-assisted drilling of microfluidic chambers inside silica glass with femtosecond laser pulses," Appl. Phys. A-Mater. Sci. Process. 83, 27-29 (2006).
23. J. D. Uram, K. Ke, A. J. Hunt, and M. Mayer, "Submicrometer pore-based characterization and quantification of antibody-virus interactions," Small 2, 967-972 (2006).
24. J. D. Uram, K. Ke, A. J. Hunt, and M. Mayer, "Label-free affinity assays by rapid detection of immune complexes in submicrometer pores," Angew. Chem.-Int. Edit. 45, 2281-2285 (2006).
25. S. Lee, J. L. Bull, and A. J. Hunt, "Acoustic limitations on the efficiency of machining by femtosecond laser-induced optical breakdown," Appl. Phys. Lett. 91, 023111 (2007).
26. R. An, J. D. Uram, E. C. Yusko, K. Ke, M. Mayer, and A. J. Hunt, "Ultrafast laser fabrication of submicrometer pores in borosilicate glass," Opt. Lett. 33, 1153-1155 (2008).
27. Z. Zhuang, J. A. Starkey, Y. Mechref, M. V. Novotny, and S. C. Jacobson, "Electrophoretic analysis of Nglycans on microfluidic devices," Anal. Chem. 79, 7170-7175 (2007).