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Journal of Electronic Materials

Volumn 37, Issue 9, 2008, Pages 1324-1328

Al- and Al:In-doped ZnO thin films deposited by RF magnetron sputtering for spacecraft charge mitigation

(5) Lennon, C a Kodama, R a Chang, Y a Sivananthan, S a Deshpande, M b

a UNIVERSITY OF ILLINOIS AT CHICAGO (United States)

b AMSENG Inc (United States)

Author keywords

Orbital stability; Radiation hardness; RF magnetron sputtering; Transparent conducting oxide; Zinc oxide

Indexed keywords

COVER GLASSES; GEOSYNCHRONOUS ORBIT; HIGH-ENERGY ELECTRONS; ORBITAL STABILITY; RADIATION HARDNESS; RF MAGNETRON SPUTTERING; SOLAR PANELS; TIN-DOPED INDIUM OXIDE; TRANSPARENT CONDUCTING OXIDE; ULTRA-VIOLET; ZNO THIN FILMS;

COMMUNICATION SATELLITES; INDIUM; INDIUM COMPOUNDS; MAGNETRON SPUTTERING; SATELLITES; SEMICONDUCTING ZINC COMPOUNDS; SOLAR ENERGY; SPACECRAFT; SURFACE CHARGE; THICK FILMS; THIN FILMS; TIN; TITANIUM COMPOUNDS; ZINC ALLOYS; ZINC OXIDE;

ALUMINUM;

EID: 51849087341 PISSN: 03615235 EISSN: None Source Type: Journal
DOI: 10.1007/s11664-008-0436-1 Document Type: Article

Times cited : (5)

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