Through-focus scanning-optical-microscope imaging method for nanoscale dimensional analysis

Optics Letters

Volumn 33, Issue 17, 2008, Pages 1990-1992

  Attota, Ravikiran ^a   Germer, Thomas A ^a   Silver, Richard M ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

OPTICS; OPTOELECTRONIC DEVICES;

DIMENSIONAL ANALYSIS; DIMENSIONAL MEASUREMENTS; MICROSCOPE IMAGING; NANO-MANUFACTURING; OPTICAL TECHNIQUE; POTENTIAL UTILITY; SEMICONDUCTOR PROCESS; THROUGH-FOCUS SCANNING;

MICROSCOPES;

EID: 51749123512     PISSN: 01469592     EISSN: None     Source Type: Journal    
DOI: 10.1364/OL.33.001990     Document Type: Article

References (12)

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