Fabrication of ion-implanted Si nanowire p-FETs

Journal of Physical Chemistry C

Volumn 112, Issue 34, 2008, Pages 13287-13291

  Lee, Seung Yong ^a   Jang, Chan Oh ^a   Kim, Dong Joo ^a   Hyung, Jung Hwan ^a   Rogdakis, Konstantinos ^b,c   Bano, Edwige ^c   Zekentes, Konstantinos ^b   Lee, Sang Kwon ^a  

^a Chonbuk National University   (South Korea)

^b INSTITUTE OF COMPUTER SCIENCE   (Greece)

^c IMEP LAHC   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC WIRE; ION BOMBARDMENT; ION IMPLANTATION; MESFET DEVICES; NANOSTRUCTURED MATERIALS; NANOSTRUCTURES; NANOWIRES; SILICON; TRANSISTORS;

P-TYPE SILICON;

FIELD EFFECT TRANSISTORS;

EID: 51749086140     PISSN: 19327447     EISSN: 19327455     Source Type: Journal    
DOI: 10.1021/jp804059g     Document Type: Article

References (16)

1. Cui, Y.; Zhong, Z.; Wang, D.; Wang, W. U.; Lieber, C. M. Nano Lett. 2003, 5, 149.
2. Kyukendall, T.; Pauzauskie, P.; Lee, S. K.; Zhang, Y.; Goldberger, J.; Yang, P. Nano. Lett. 2003, 5, 1063.
3. Goldberger, J.; Sirbuly, D. J.; Law, M.; Yang, P. J. Phys. Chem. B 2005, 109, 9.
4. Cui, Y.; Lieber, C. M. Science 2001, 291, 851.
5. Duan, X.; Huang, Y.; Cui, Y.; Wang, J.; Lieber, C. M. Nature 2001, 409, 66.
6. Lee, S. K.; Kim, T. H.; Lee, S. Y; Choi, K. C.; Yang, P. Phil. Mag. 2007, 87, 2105.
7. Huang, Y.; Duan, X.; Cui, Y.; Lieber, C. M. Nano Lett. 2002, 2, 101.
8. Gudiksen, M. S.; Lauhon, L. J.; Wang, J.; Smith, D. C.; Lieber, C. M. Nature 2002, 415, 617.
9. Tutuc, E.; Appenzeller, J.; Reuter, M. C.; Guha, S. Nano. Lett. 2006, 6, 2070.
10. Hayden, O.; Björk, M. Y.; Schmid, H.; Riel, H.; Drechsler, U.; Karg, S. F.; Lörtscher, E.; Riess, W. Small 2007, 3, 230.
11. Cohen, G. M.; Rooks, M. J.; Chu, J. O.; Laux, S. E.; Solomon, P. M.; Ott, J. A.; Miller, R. J.; Haensch, W. Appl. Phys. Lett. 2007, 90, 23310.
12. ATLAS User's Manual; SILVACO Inc., CA, 2006.
13. Wu, Y.; Yan, H.; Huang, M.; Messer, B.; Song, J.; Yang, P. Chem. Eur. J. 2002, 8, 1260.
14. Xia, Y.; Yang, P.; Sun, Y.; Wu, Y.; Mayers, B.; Gates, B.; Yin, Y.; Kim, F.; Yan, H. Adv. Mater. 2003, 15, 353.
15. Ziegler, J. SRIM User's Manual (www.srim.org).
16. Hang, Q.; Wang, F.; Carpenter, P. D.; Zemlyanov, D.; Zakharov, D.; Stach, E. A.; Buhro, W. E.; Janes, D. B. Nano Lett. 2008, 8, 49.