Misted deposition of [3D] trenches for drams and frams III. PZT thin films and PZT nanotubes

IEEE International Symposium on Applications of Ferroelectrics

Volumn , Issue , 2007, Pages 38-40

  Miyake, M ^a,c   Scott, J F ^a   Lou, X J ^a   Morrison, F D ^b   Motoyama, S ^c   Tatsuta, T ^c   Tsuji, O ^c  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^b UNIVERSITY OF ST ANDREWS   (United Kingdom)

^c 33 Tanakamiya cho Takeda F   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

LEAD; PIEZOELECTRIC MATERIALS; PIEZOELECTRIC TRANSDUCERS; SEMICONDUCTING LEAD COMPOUNDS; TECHNICAL PRESENTATIONS; THICK FILMS; ZIRCONIUM;

INTERNATIONAL SYMPOSIUM; PZT THIN FILMS;

PIEZOELECTRIC ACTUATORS;

EID: 51349146669     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ISAF.2007.4393160     Document Type: Conference Paper

References (10)

1. International Technology Roadmap for Semiconductors (2003)
2. T. Shiosaki, S. Okamura, M. Miyake, Y. Otani, and N. Abe, "Fabrication of PZT Thin Films by Liquid Delivery MOCVD with Conventional Multi-Sources and a Novel Cocktail Source" Ferroelectrics, 293 69-88 (2003).
3. 3/Ir Capacitors Solely by Metalorganic Chemical Vapor Deposition" Jpn. J. Appl. Phys. 40 5551-5553 (2001).
4. 3 Thin Films by Source Gas Pulse-Introduced Metalorganic Chemical Vapor Deposition" Jpn. J. Appl. Phys. 40 4126-4130 (2001).
5. F. D Morrison, Laura Ramsay, and James F Scott, "High aspect ratio piezoelectric strontium-bismuthtantalate nanotubes," J. Phys.: Condens. Matter 15 527-532 (2003).
6. M. Miyake, J. F. Scott, X.-J. Lou, F. D. Morrison, T. Tatsuta, and O. Tsuji "Misted deposition of [3D] trench for DRAMS and FRAMS II. PZT thin films" ISIF2006 proceedings (2006).
7. F. D. Morrison, Y. Luo, I. Szafraniak, V Nagarajan, R. B. Wehrspohn, M. Steinhart, J.H. Wendorff, N.D. Zakharov, E.D. Mishina, K. A. Vorotilov, A.S. Sigov, S. Nakabayashi, M. Alexe, R Ramesh, and J. F. Scott "Ferroelectric Nanotubes," Rev. Adv. Mater. Sci. 4, 114-122 (2003).
8. F. D. Morrison, X. Luo, Ming Zhang, M. Miyake, and J. F. Scott, "Chemical solution deposition of Hafnia and Zirconia films from novel precursors," ISIF2004 proceedings (2004).
9. 2) For Microelectrronics," Integrated Ferroelectrics 74, 165-172 (2005).
10. 2 Electrodes" ISIF2006 proceedings (2006).