Temperature-compensated structure for SAW pressure sensor in very high temperature

Proceedings of the IEEE International Frequency Control Symposium and Exposition

Volumn , Issue , 2007, Pages 40-44

  Hoang, Trang ^a,b   Rey, Patrice ^b   Vaudaine, Marie Helene ^b   Danel, Jean Sébastien ^b   Robert, Philippe ^b   Benech, Philippe ^c   Lemaitre Auger, Pierre ^c  

^a IEEE

^b CEA LETI   (France)

^c IMEP LAHC   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC SURFACE WAVE FILTERS; ACOUSTIC WAVES; ACOUSTICS; CARBON DIOXIDE ARC WELDING; ELECTRIC CURRENTS; ELECTROMECHANICAL DEVICES; PRESSURE SENSORS; PRESSURE TRANSDUCERS; SAWING; SENSORS;

EUROPEAN; FREQUENCY CONTROLS; HIGH TEMPERATURE;

ACOUSTIC WAVE VELOCITY;

EID: 51049091200     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/FREQ.2007.4319026     Document Type: Conference Paper

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