A study of surface acoustic wave pressure sensor in ZnO/Quartz structure

Proceedings of IEEE Sensors

Volumn 2, Issue , 2004, Pages 550-553

  Talbi, A ^a   Elhakiki, M ^a   Sarry, F ^a   Elmazria, O ^a   Le Brizoual, L ^a   Alnot, P ^a  

^a Laboratoire de Physique des Milieux Ionisés et Applications   (France)

Author keywords

K 2; Quartz; SAW; TCF; Y X cut; ZnO

Indexed keywords

K2; SAW; Y-X CUT; ZNO;

NATURAL FREQUENCIES; PRESSURE MEASUREMENT; QUARTZ; SENSITIVITY ANALYSIS; ZINC OXIDE;

SENSORS;

EID: 27944503458     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

1. R. M. White, "Surface acoustic wave sensors", IEEE Ultrason.Symp. ,pp. 490-494, 1985.
2. Y. Dake, M. Tokai, Developement of a SAW pressure sensor using stainless steel diaphragm, Solid-State Sensors and Actuators, 1991, p. 1009.
3. A. Talbi and al "Pressure sensitivity of Rayleigh and Sezawa wave in ZnO/Si(001) structures "Proceedings of the World Congress on Ultrasonics 2003 September7 - 10, 2003 - Paris, FRANCE, pp. 479-482.
4. A. Talbi, F. Sarry, L. Le Brizoual, O. Elmazria, and P. Alnot, Development of SAW pressure sensor using ZnO/Si structure, Proc. of the 2004 International Ultrasonics Ferroelectrics and Frequency Control 50th Anniversary Joint Conference, Montreal, August 24-27, 2004.
5. J.J. Campbell and W. R. Jones, IEEE Trans. Sonics & Ultrason., vol. SU-15, n°4, pp. 209-217 (Oct. 1968).
6. H.F.Tiersten, Perturbation theory for linear electroelastic equations for small field superposed on a bias", J. Acoust. Soc. Am., Vol. 64, No. 3, Sept, 1978, pp. 832-837.
7. M. Kadota, H. Kando, "Small and low loss IF SAW filters with excellent temperature coefficient consisting of Zinc Oxide film on Quartz substrate", IEEE Ultrason. Symp., pp. 167-171, 2002.