Pressure sensitivity of rayleigh and sezawa wave in ZNO/SI(001) structures

Proceedings of the IEEE Ultrasonics Symposium

Volumn 2, Issue , 2003, Pages 1338-1341

  Talbi, A ^a   Sarry, F ^a   Le Brizoual, L ^a   Elhakiki, M ^a   Elmazria, O ^a   Alnot, P ^a  

^a INSTITUT JEAN LAMOUR   (France)

Author keywords

[No Author keywords available]

Indexed keywords

PHOTOLITHOGRAPHY; PIEZOELECTRIC MATERIALS; RADIATION; RAYLEIGH FADING; SCANNING ELECTRON MICROSCOPY; SENSITIVITY ANALYSIS; SILICON; STRUCTURE (COMPOSITION); THIN FILMS; TRANSDUCERS; X RAY DIFFRACTION; ZINC OXIDE;

INTERDIGITAL TRANSDUCERS (IDT); PRESSURE SENSITIVITY; SEZAWA WAVES; SILICON SUBSTRATES;

ELASTIC WAVES;

EID: 4143083049     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. N. Tirole, A. Choujaa, D. Hauden, G. Martin, Lamb wave pressure sensor using an AIN/Si structure, 1993 Ultrasonics Symposium, pp371-374.
2. D. Hauden, M. Planat, J-J. Gagnepain, Nonlinear properties of surface acoustic waves applications to oscillators and sensors, IEEE Trans. On Sonics and Ultrasonics, vol. su -28, n°5, September 1981, pp 342-348
3. S. Tadashi, Y. Takashi and K. Kawabata, Higher order mode Rayleigh waves propagation on ZnO/Substrate structures, Proc. IEEE Ultrasonic Symp. 1977, pp 814-818.
4. A.L.Nalamwar and M. Epstein, Strain Effect in ZnO Film SAW Devices, Proc. IEEE Ultrasonic Symp. 1974, pp 129-131.
5. H.F. Tiersten, Perturbation theory for linear electroelastic equations for small field superposed on a bias", J. Acoust. Soc. Am., Vol. 64, No. 3, Sept., 1978 pp 832-837.