Piezoelectrically activated silicon resonators

Proceedings of the IEEE International Frequency Control Symposium and Exposition

Volumn , Issue , 2007, Pages 1210-1213

  Baborowski, J ^a   Bourgeois, C ^a   Pezous, A ^a   Muller, C ^a   Dubois, M A ^a  

^a CSEM   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

COUPLING COEFFICIENTS; EUROPEAN; FREQUENCY CONTROLS;

RESONATORS;

EID: 51049084833     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/FREQ.2007.4319269     Document Type: Conference Paper

References (7)

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2. th Annual Frequency Control Symposium, 791-799, (1997).
3. M. Hopcroft, R. Melamud, R. N. Candler, Woo-Tae Park, B. Kim, G. Yama, APartridge, M. Lutz, T. W. Kenny, "Active temperature compensation for micromachined resonators", Solid-State Sensor, Actuator and Microsystems Workshop, Hilton Head Island, South Carolina, June 6-10, 2004, p. 364-367.
4. W. T. Hsu C. T.-C.Nguyen, "Stiffness-compensated temperatureinsensitive micromechanical resonators", The Fifteenth IEEE International Conference on Micro Electro Mechanical Systems, 2002, 731-734.
5. R. Melamud, B. Kim, M. Hopcroft, S. Chandorkar, M. Agarwal, C. M. Jha, T. W. Kenny, "Composite flexural-mode resonator with controllable turnover temperature", MEMS 2007, Kobe, Japan, 199-202.
6. V. Kaajakari, T. Mattila, A. Oja, J. Kiihamaki, H. Seppä "Square-Extensional Mode Single-Crystal Silicon Micromechanical Resonator for Low-Phase-Noise Oscillator Applications", IEEE Electron Device Letters, Vol. 25, No. 4, April 2004, 173
7. M.-ADubois, J.-F.Carpentier, P. Vincent, C. Billard, G. Parat, C. Muller, P. Ancey, P. Conti, "Monolithic above-IC resonator technology for integrated architectures in mobile and wireless communication" IEEE Journal of Solid State Circuit, 2006, Vol 41, 7-16.