In situ optical characterization and reengineering of interference coatings

Applied Optics

Volumn 47, Issue 13, 2008, Pages

  Wilbrandt, Steffen ^a   Stenzel, Olaf ^a   Kaiser, Norbert ^a   Trubetskov, Michael K ^b   Tikhonravov, Alexander V ^b  

^a FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

^b MOSCOW STATE UNIVERSITY   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

IN SITU PROCESSING; OPTICAL COATINGS;

IN-SITU TRANSMISSION; INTERFERENCE COATINGS; MEASUREMENTS OF; MONITORING STRATEGY; OPTICAL CHARACTERIZATION; OPTICAL MONITORING SYSTEMS; TRANSMISSION SPECTRUMS; WAVELENGTH RANGES;

REENGINEERING;

EID: 50849095495     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.47.000C49     Document Type: Article

References (17)

1. J. Kruschwitz, "Software tools speed optical thin-film design," Laser Focus World 39(6), 157-166 (2003).
2. A. V. Tikhonravov and M. K. Trubetskov, "Computational manufacturing as a bridge between design and production," Appl. Opt. 44, 6877-6884 (2005).
3. B. Vidal, A. Fornier, and E. Pelletier, "Optical monitoring of nonquarterwave multilayer filters," Appl. Opt. 17, 1038-1047 (1978).
4. F. J. Van Milligen, B. Bovard, M. R. Jacobson, J. Mueller, R. Potoff, R. L. Shoemaker, and H. A. Macleod, "Development of an automated scanning monochromator for monitoring thin films," Appl. Opt. 24, 1799-1802 (1985).
5. B. Vidal, A. Fornier, and E. Pelletier, "Wideband optical monitoring of nonquarterwave multilayer filters," Appl. Opt. 18, 3851-3856 (1979).
6. H. A. Macleod, "Monitoring of optical coatings," Appl. Opt. 20, 82-89 (1981).
7. A. V. Tikhonravov, M. K. Trubetskov, and T. V. Amotchkina, "Investigation of the effect of accumulation of thickness errors in optical coating production by broadband optical monitoring," Appl. Opt. 45, 7026-7034 (2006).
8. A. V. Tikhonravov, M. K. Trubetskov, and T. V. Amotchkina, "Statistical approach to choosing a strategy of monochromatic monitoring of optical coating production," Appl. Opt. 45, 7863-7870 (2006).
9. J. A. Dobrowolski, F. C. Ho, and A. Waldorf, "Determination of optical constants of thin film coating materials based on inverse synthesis," Appl. Opt. 22, 3191-3200 (1983).
10. JETI Technische Instrumente GmbH, http://www.jeti.com.
11. D. Ristau, H. Ehlers, T. Gross, and M. Lappschies, "Optical broadband monitoring of conventional and ion processes," Appl. Opt. 45, 1495-1501 (2006).
12. A. V. Tikhonravov and M. K. Trubetskov, "Online characterization and reoptimization of optical coatings," Proc. SPIE 5250, 406-413 (2003).
13. A. V. Tikhonravov, M. K. Trubetskov, M. A. Kokarev, T. V. Amotchkina, A. Duparré, E. Quesnel, D. Ristau, and S. Günster, "Effect of systematic errors in spectral photometric data on the accuracy of determination of optical parameters of dielectric thin films," Appl. Opt. 41, 2555-2560 (2002).
14. A. S. Kaminskii, E. L. Kosarev, and E. V. Lavrov, "Using comb-like instrumental functions in high-resolution spectroscopy," Meas. Sci. Technol. 8, 864-870 (1997).
15. R. M. Smith, "How linear are typical CCDs?" Exp. Astron. 8, 59-72 (1998).
16. LCalc software, lcalc@scidev.de.
17. A. Duparre and D. Ristau, "Measurement problem," in Optical Interference Coatings Topical Meeting 2007 (Optical Society of America, 2007), poster ThB1.