Structure, composition, morphology and electrical properties of amorphous SiOx (0 < x < 2) thin films

Thin Solid Films

Volumn 516, Issue 22, 2008, Pages 8205-8209

  Tomozeiu, N ^a   Rheiter, H J H ^a  

^a OCÉ TECHNOLOGIES B V   (Netherlands)

Author keywords

Electrical properties; Silicon oxide; Sputtering; Surface morphology

Indexed keywords

AMORPHOUS SILICON; ELECTRIC PROPERTIES; NONMETALS; SILICON; SILICON COMPOUNDS; THICK FILMS;

ELECTRICAL PROPERTIES; SILICON OXIDE; SPUTTERING; SURFACE MORPHOLOGY; THIN FILMS;

AMORPHOUS FILMS;

EID: 50649089388     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2008.04.030     Document Type: Article

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