Thickness determination of SrZrO3 thin films using both X-ray reflectometry and SIMS techniques

Thin Solid Films

Volumn 516, Issue 22, 2008, Pages 7967-7973

  Galicka Fau, K ^a   Legros, C ^a   Andrieux, M ^a   Herbst Ghysel, M ^a   Gallet, I ^a   Condat, M ^a   Durand, O ^b   Servet, B ^b  

^a UNIVERSITÉ PARIS SACLAY   (France)

^b THALES RESEARCH AND TECHNOLOGY   (France)

Author keywords

FTIR; Perovskite; SIMS; SrZrO3; Thin films; XRR

Indexed keywords

FTIR; PEROVSKITE; SIMS; SRZRO3; THICKNESS DETERMINATION; THIN FILMS; XRR;

EID: 50649087477     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2008.04.005     Document Type: Article

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