FT-IR, structure and dielectric property investigation of strontium zirconate thin films prepared by MOD technique

Surface and Coatings Technology

Volumn 167, Issue 2-3, 2003, Pages 245-248

  Chen, Changhong ^a   Zhu, Weiguang ^a   Yu, Ting ^a   Chen, Xiaofeng ^a   Yao, Xi ^a   Gopal Krishnan, R ^b  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b INSTITUTE OF MICROELECTRONICS   (Singapore)

Author keywords

Dielectric characteristics; FT IR; Perovskite type oxides; Strontium zirconate; X ray diffraction

Indexed keywords

ANNEALING; CRYSTALLIZATION; DECOMPOSITION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; PERMITTIVITY; PEROVSKITE; PHASE TRANSITIONS; STRONTIUM COMPOUNDS; SYNTHESIS (CHEMICAL);

WET CHEMICAL TECHNOLOGY;

THIN FILMS;

COATING; CRYSTAL HABIT; DIELECTRIC PROPERTY; FOURIER TRANSFORM; INFRARED SPECTROSCOPY; OXIDE; STRONTIUM; ZIRCONIUM;

EID: 0037461181     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(02)00914-3     Document Type: Article

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