Structural and electric properties of SrZrO3 thin films on different Pt bottom electrodes

Ceramics International

Volumn 30, Issue 7, 2004, Pages 1547-1551

  Lu, Y K ^a   Chen, C H ^a   Zhu, W ^a   Yu, T ^a   Chen, X F ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

A. Films; A. Sol gel processes; C. Electrical properties; E. Capacitors

Indexed keywords

AMORPHOUS MATERIALS; CAPACITORS; CARBONATE MINERALS; CRYSTALLINE MATERIALS; DEPOSITION; ELECTRIC PROPERTIES; ELECTRODES; FOURIER TRANSFORM INFRARED SPECTROSCOPY; MICROSTRUCTURE; PEROVSKITE; PHASE TRANSITIONS; SCANNING ELECTRON MICROSCOPY; SOL-GELS; STRONTIUM COMPOUNDS; X RAY DIFFRACTION ANALYSIS; ZIRCONIUM COMPOUNDS;

ELECTRICAL PROPERTIES; LEAKAGE PROPERTIES; METAL-ORGANIC DECOMPOSITION TECHNOLOGY; SOL-GEL PROCESSES;

THIN FILMS;

EID: 4344664613     PISSN: 02728842     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ceramint.2003.12.095     Document Type: Conference Paper

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