Effects of energetic species during the growth of boron nitride and amorphous carbon thin films by sputter deposition

Reviews on Advanced Materials Science

Volumn 5, Issue 4, 2003, Pages 270-280

  Logothetidis, S ^a  

^a ARISTOTLE UNIVERSITY OF THESSALONIKI   (Greece)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; ARGON; BORON COMPOUNDS; CARBON; CHEMICAL BONDS; COMPOSITION EFFECTS; ELECTRON ENERGY LEVELS; FILM GROWTH; IMPURITIES; IRRADIATION; SPUTTER DEPOSITION; SURFACE REACTIONS;

AMORPHOUS CARBON; ARGRON IMPURITIES; BORON NITRIDE; DOMINANT EFFECTS; ENERGETIC SPECIES; ION ENERGY; SURFACE EFFECTS;

THIN FILMS;

EID: 5044232772     PISSN: 16065131     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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