Pulsed DC plasma enhanced chemical vapor deposited TiN/Ti(C,N) multilayer coatings

Transactions of Nonferrous Metals Society of China (English Edition)

Volumn 10, Issue 4, 2000, Pages 489-492

  Ma, Sheng Li ^a   Li, Yan Huai ^a   Nan, Jun Ma ^a   Xu, Ke Wei ^a  

^a XI'AN JIAOTONG UNIVERSITY   (China)

Author keywords

Microstructures; PCVD; Properties; TiN Ti(C,N) multilayer coating

Indexed keywords

CHEMICAL VAPOR DEPOSITION; MECHANICAL PROPERTIES; MICROSTRUCTURE; MULTILAYERS; PLASMAS; TITANIUM COMPOUNDS;

FREE COLUMN STRUCTURE; INTERFACIAL ADHESION;

COATINGS;

EID: 0034240445     PISSN: 10036326     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (11)

1. Rie K T and Broszeit E. Plasma diffusion treatment and duplex treatment: recent development and new application [J]. Surf Coat Technol, 1995, 76/77: 425-436.
2. Rother B, Kappl H, Pfeifer-Schaller I, et al. Property distribution on three-dimensionally shaped PVD-coated samples [J]. Surf Coat Technol, 1997, 97: 200-205.
3. TANG Bin, ZHU Xiao-dong, HU Nai-sai, et al. Formation of Cr-N coatings by ion beam enhanced deposition (IBED) [J]. The Chinese Journal of Nonferrous Metals, (in Chinese), 1999,9(1): 69-72.
4. Kenji Hiramatsu, Hiroshi Ohnishi, Toru Takahama, et al. Formation of TiN films with low Cl concentration by pulsed plasma chemical vapor deposition [J]. J Vac Sci Technol, 1996, A14: 1037-1040.
5. Mogensen K S, Thomson N B, Eskilden S S, et al. A parametric study of the microstructure, mechanical and tribological properties of PACVD TiN coatings [J]. Surf Coat Technol, 1998, 99: 140-146.
6. Mogensen K S, Mathiasen C, Eskildsen S S, et al. The time development of pulsed-DC production plasma used for deposition of TiN [J]. Surf Coat Technol, 1998, 102: 35-40.
7. 1-x[J]. Thin Solid Films, 1981, 80: 221-225.
8. BAI Shen-dong. The study of bonding strength and corrosion behavior of PCVD TiN based hard coatings [D]. Xi'an: Xi'an Jiaotong University, 1994. 12.
9. HUANG H H, HE J L and Hon M H. Microstructure and mechanical properties of surface layer obtained by plasma nitriding and/or TiN coatings on high-speed steel [J]. Surf Coat Technol, 1994, 64: 41-46.
10. XIE Fei. The study of duplex treatment of plasma nitriding and PCVD TiN [D]. Xi'an: Xi'an Jiaotong University, 1997. 12.
11. Mayer P and Stock H R. Deposition of TiN and Ti(O, C,N) hard coatings by a plasma assisted chemical vapor deposition process [J]. J Vac Sci Technol, 1986, A4 (6): 2726-2730.