Electrical and optical properties of undoped p-type ZnO films

Surface and Coatings Technology

Volumn 202, Issue 22-23, 2008, Pages 5463-5466

  Nam, K H ^a   Kim, H ^a   Lee, H Y ^a   Han, D H ^a   Lee, J J ^a  

^a Seoul National University   (South Korea)

Author keywords

CVD; Inductively coupled plasma; p type ZnO

Indexed keywords

DIAMOND FILMS; ION BEAM ASSISTED DEPOSITION; METALLIC FILMS; METALS; OPTICAL PROPERTIES; ORGANOMETALLICS; OXIDE MINERALS; PHOTORESISTS; PLASMA DEPOSITION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; QUARTZ; SEMICONDUCTING CADMIUM TELLURIDE; SEMICONDUCTING ZINC COMPOUNDS; SILICON; ZINC ALLOYS; ZINC OXIDE;

COUPLED PLASMAS; CVD; ELECTRICAL AND OPTICAL PROPERTIES; ICP-CVD; METAL ORGANIC; P-TYPE ZNO; P-TYPE ZNO FILMS; QUARTZ SUBSTRATES; SI(100); ZNO FILMS;

INDUCTIVELY COUPLED PLASMA;

EID: 50349088134     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2008.06.120     Document Type: Article

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