Simulation and visualization of self-assembled nanodevice networks synthesized via plasma-surface interaction

IEEE Transactions on Plasma Science

Volumn 36, Issue 4 PART 1, 2008, Pages 866-867

  Levchenko, Igor ^a   Ostrikov, Kostya ^a   Cvelbar, Uros ^a,b  

^a UNIVERSITY OF SYDNEY   (Australia)

^b JO EF STEFAN INSTITUTE   (Slovenia)

Author keywords

Atomic layer deposition; Carbon; Nanodevice; Nanostructures; Plasma surface interaction; Plasmas; Self assembly; Substrates; Surface treatment; Visualization

Indexed keywords

MONTE CARLO METHODS; MOSFET DEVICES; NANOSTRUCTURED MATERIALS; PLASMA INTERACTIONS; PLASMAS; THREE DIMENSIONAL; THREE DIMENSIONAL COMPUTER GRAPHICS;

3-D VISUALIZATION; ADSORBED ATOMS; ATOMIC LAYER DEPOSITION; CARBON; INITIAL STAGES; INTERNETWORKED; KINETIC MONTE CARLO SIMULATIONS; MULTI SCALING; NANO DEVICES; NANO-SCALE SYSTEMS; NANODEVICE; NANOSTRUCTURES; PLASMA SCIENCE; PLASMA-SURFACE INTERACTION; PLASMA-SURFACE INTERACTIONS; PREDICTIVE MODELING; SELF-ASSEMBLED; SELF-ASSEMBLY; SELF-ORGANIZED GROWTH; SUBSTRATES; SURFACE TREATMENT; VISUALIZATION TECHNIQUES;

VISUALIZATION;

EID: 50249177210     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2008.924408     Document Type: Article

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