Angular distribution of carbon ion flux in a nanotube array during the plasma process by the Monte Carlo technique

Physics of Plasmas

Volumn 14, Issue 11, 2007, Pages

  Levchenko, I ^a   Ostrikov, K ^a,c   Keidar, M ^b   Vladimirov, S V ^a  

^a UNIVERSITY OF SYDNEY   (Australia)

^b George Washington University   (United States)

^c NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ADATOMS; ANGULAR DISTRIBUTION; CARBON NANOTUBES; COMPUTER SIMULATION; CURRENT DENSITY; MONTE CARLO METHODS;

ION CURRENT FLUX; MICROSCOPIC ION FLUXES; RECTANGULAR ARRAYS;

METAL IONS;

EID: 36749056898     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2806329     Document Type: Article

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